A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm
Haitjema, H., Pril, W., Schellekens, P.H.J.
Published in IEEE transactions on instrumentation and measurement (01.12.2001)
Published in IEEE transactions on instrumentation and measurement (01.12.2001)
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Journal Article
ASSESSMENT APPARATUS AND METHODS
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Year of Publication 11.01.2024
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Year of Publication 11.01.2024
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Interferometric stage positioning apparatus
Baggen, Marcel Koenraad Marie, Van Der Pasch, Engelbertus Antonius Fransiscus, Pril, Wouter Onno
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
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INTERFEROMETRIC STAGE POSITIONING APPARATUS
BAGGEN, Marcel Koenraad Marie, VAN DER PASCH, Engelbertus Antonius Fransiscus, PRIL, Wouter Onno
Year of Publication 23.07.2020
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Year of Publication 23.07.2020
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APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
VAN GEND, Johan, GOSEN, Jeroen Gerard, KOOIKER, Allard Eelco, RONDE, Michaél Johannes Christiaan, VAN DE GROES, Henricus Martinus Johannes, ARORA, Sampann, KUINDERSMA, Lucas, DE VOS, Youssef Karel Maria, KEULEN, Luuc, VAN BANNING, Dennis Herman Caspar, PRIL, Wouter Onno
Year of Publication 29.06.2023
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Year of Publication 29.06.2023
Patent
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
GOSEN, Jeroen, VAN GEND, Johan, DE VOS, Youssef, VAN DE GROES, Henricus, PRIL, Wouter, VAN BANNING, Dennis, ARORA, Sampann, KUINDERSMA, Lucas, KEULEN, Luuc, KOOIKER, Allard, RONDE, Michaël
Year of Publication 16.12.2021
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Year of Publication 16.12.2021
Patent
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
VAN GEND, Johan, PRIL, Wouter, Onno, GOSEN, Jeroen, Gerard, DE VOS, Youssef, Karel, Maria, VAN DE GROES, Henricus, Martinus, Johannes, VAN BANNING, Dennis, Herman, Caspar, ARORA, Sampann, RONDE, Michaël, Johannes, Christiaan, KUINDERSMA, Lucas, KEULEN, Luuc, KOOIKER, Allard, Eelco
Year of Publication 15.12.2021
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Year of Publication 15.12.2021
Patent
ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
COSIJNS Suzanne Johanna, Antonetta, TONG-MINH Bryan, PRIL Wouter Onno, KOOIKER Allard Eelco, BAARTMAN Jan Peter
Year of Publication 30.11.2017
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Year of Publication 30.11.2017
Patent
Encoder, position measurement system and lithographic apparatus
MR. JAN PETER BAARTMAN, WOUTER PRIL, BRYAN TONG-MINH, EELCO KOOIKER, SUZANNE COSIJNS
Year of Publication 20.09.2016
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Year of Publication 20.09.2016
Patent
Lithographic apparatus and position measuring method
EUSSEN, EMIEL JOZEF MELANIE, VAN EMPEL, TJARKO ADRIAAN RUDOLF, PRIL, WOUTER ONNO
Year of Publication 14.09.2016
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Year of Publication 14.09.2016
Patent
Assessment apparatus and methods
HEMPENIUS, PETER PAUL, SLOT, ERWIN, BOSCH, NIELS JOHANNES MARIA, HAARTSEN, THOMAS IZAAK FRED, SMEETS, MARTIN FRANS PIERRE, GRASMAN, JASPER HENDRIK, PRIL, WOUTER ONNO, CHEN, TE-YU
Year of Publication 16.03.2024
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Year of Publication 16.03.2024
Patent