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Year of Publication 26.05.2006
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LITHOGRAPHIC APPARATUS AND POSITION MEASURING METHOD
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Year of Publication 19.05.2006
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Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
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Year of Publication 16.01.2008
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Year of Publication 17.05.2006
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Year of Publication 20.04.2006
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Lithographic apparatus and position measuring method
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Year of Publication 12.04.2006
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Year of Publication 17.01.2006
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Enhanced lithographic displacement measurement system
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Year of Publication 25.10.2005
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Year of Publication 25.10.2005
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Lithographic apparatus and method for determining z position errors/variations and substrate table flatness
PRIL, WOUTER, ONNO, ADRIAENS, JOHANNES MATHIAS THEODORUS ANTONIUS, MINNAERT, ARTHUR WINFRIED EDUARDUS, OUWEHAND, LUBERTHUS, KOENEN, WILLEM HERMAN GERTRUDA ANNA
Year of Publication 11.07.2007
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Year of Publication 11.07.2007
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Lithographic apparatus and method for determining z position errors/variations and substrate table flatness
PRIL WOUTER ONNO, MINNAERT ARTHUR WINFRIED EDUARDUS, OUWEHAND LUBERTHUS, ADRIENS JOHANNES MATHIAS THEODORUS ANTONIUS, KOENEN WILLEM HERMAN GERTRUDA ANNA
Year of Publication 26.07.2006
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Year of Publication 26.07.2006
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Enhanced lithographic displacement measurement system
Pril, Wouter, F. Van De Pasch, Engelbertus, Dillon, Robert, Henshaw, Philip
Year of Publication 02.09.2004
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Year of Publication 02.09.2004
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Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness
MINNAERT, ARTHUR WINFRIED EDUARDUS, OUWEHAND, LUBERTHUS, ADRIENS, JOHANNES MATHIAS THEODORUS ANTONIUS, KOENEN, WILLEM HERMAN GERTRUDA ANNA, PRIL, WOUTER ONNO
Year of Publication 05.07.2006
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Year of Publication 05.07.2006
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LITHOGRAPHIC APPARATUS AND METHOD FOR DETERMINING Z POSITION ERRORS/VARIATIONS AND SUBSTRATE TABLE FLATNESS
PRIL WOUTER ONNO, MINNAERT ARTHUR WINFRIED EDUARDUS, OUWEHAND LUBERTHUS, ADRIENS JOHANNES MATHIAS THEODORUS ANTONIUS, KOENEN WILLEM HERMAN GERTRUDA ANNA
Year of Publication 03.07.2006
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Year of Publication 03.07.2006
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LITHOGRAPHY DEVICE AND METHOD FOR MANUFACTURING DEVICE
VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS, PRIL WOUTER ONNO, DILLON ROBERT F, HENSHAW PHILIP DENNIS
Year of Publication 24.06.2004
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Year of Publication 24.06.2004
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Lithographic apparatus and device manufacturing method
HENSHAW, PHILIP DENNIS, VAN DER PASCH, EGELBERTUS ANTONIUS FRANSISCUS, PRIL, WOUTER ONNO, DILLON, ROBERT
Year of Publication 02.06.2004
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Year of Publication 02.06.2004
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