METHOD FOR PROVIDING HIGH ETCH RATE
RUSU CAMELIA, LIN FRANK Y, XU QING, MILLER ALAN J, WINNICZEK JAROSLAW W
Year of Publication 25.03.2014
Get full text
Year of Publication 25.03.2014
Patent
METHOD FOR ACHIEVING SMOOTH SIDE WALLS AFTER BOSCH ETCH PROCESS
HAM, JIN HWAN, HEO, SEONG JUN, YOON, SANG JOON, RUSU CAMELIA, LIN FRANK Y, MILLER ALAN J, XU QING, WINNICZEK JAROSLAW W
Year of Publication 07.05.2014
Get full text
Year of Publication 07.05.2014
Patent
Fabrication of a silicon structure and deep silicon etch with profile control
Chebi Robert, Lassig Stephan, Rusu Camelia, Moore Erin, Bogart Jeff, Lin Frank, Winniczek Jaroslaw W, Chen Wan-Lin, Zheng Lily
Year of Publication 09.01.2018
Get full text
Year of Publication 09.01.2018
Patent