METHOD FOR PREDICTING RESIST DEFORMATION
BATISTAKIS CHRYSOSTOMOS, JEURISSEN ROGER JOSEF MARIA, WINKELS KOEN GERHARDUS
Year of Publication 01.07.2024
Get full text
Year of Publication 01.07.2024
Patent
레지스트 변형 예측 방법
BATISTAKIS CHRYSOSTOMOS, JEURISSEN ROGER JOSEF MARIA, WINKELS KOEN GERHARDUS
Year of Publication 29.07.2021
Get full text
Year of Publication 29.07.2021
Patent
액적 생성기 성능을 모니터링 및 제어하는 장치 및 방법
ERSHOV ALEXANDER IGOREVICH, DRIESSEN THEODORUS WILHELMUS, ROLLINGER BOB, TREES DIETMAR UWE HERBERT, VASCHENKO GEORGIY OLEGOVICH, WINKELS KOEN GERHARDUS
Year of Publication 03.12.2020
Get full text
Year of Publication 03.12.2020
Patent
기판 지지부, 리소그래피 장치, 전하 분포를 조작하기 위한 방법 및 기판을 준비하기 위한 방법
HARBERTS DIRK WILLEM, BEERENS RUUD ANTONIUS CATHARINA MARIA, VAN DER VOORT DENNIS DOMINIC, STEVENS LUCAS HENRICUS JOHANNES, WINKELS KOEN GERHARDUS, LEENKNEGT GEORGE ALOIS LEONIE, BOS EDWIN JOHANNES CORNELIS, TEN KATE NICOLAAS
Year of Publication 15.07.2022
Get full text
Year of Publication 15.07.2022
Patent
리소그래피 장치, 극자외선 소스 및 리소그래피 장치를 위한 액적 생성기
VAN DE VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS, VASCHENKO GEORGIY O, DRIESSEN THEODORUS WILHELMUS, NIEUWENKAMP JAN OKKE, BAUMGART PETER MICHAEL, AANGENENT WILHELMUS HENRICUS THEODORUS MARIA, DIJKSMAN JOHAN FREDERIK, WINKELS KOEN GERHARDUS, KAMPINGA WIM RONALD, RUOTSALAINEN JARI
Year of Publication 27.08.2018
Get full text
Year of Publication 27.08.2018
Patent
Method for predicting resist deformation
Batistakis, Chrysostomos, Jeurissen, Roger Josef Maria, Winkels, Koen Gerhardus
Year of Publication 27.02.2024
Get full text
Year of Publication 27.02.2024
Patent
METHOD FOR PREDICTING RESIST DEFORMATION
BATISTAKIS, Chrysostomos, JEURISSEN, Roger Josef Maria, WINKELS, Koen Gerhardus
Year of Publication 19.10.2023
Get full text
Year of Publication 19.10.2023
Patent
Method for predicting resist deformation
Batistakis, Chrysostomos, Jeurissen, Roger Josef Maria, Winkels, Koen Gerhardus
Year of Publication 25.07.2023
Get full text
Year of Publication 25.07.2023
Patent
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
HABETS, Michel, Ben, Isel, TEN KATE, Nicolaas, WINKELS, Koen, Gerhardus
Year of Publication 28.12.2022
Get full text
Year of Publication 28.12.2022
Patent
METHOD FOR PREDICTING RESIST DEFORMATION
BATISTAKIS, Chrysostomos, JEURISSEN, Roger Josef Maria, WINKELS, Koen Gerhardus
Year of Publication 10.03.2022
Get full text
Year of Publication 10.03.2022
Patent
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
HABETS, Michel, Ben, Isel, TEN KATE, Nicolaas, WINKELS, Koen, Gerhardus
Year of Publication 25.08.2021
Get full text
Year of Publication 25.08.2021
Patent
METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, METHOD OF USE
STEUR, Michael Marinus Anna, TEN KATE, Nicolaas, DE GROOT, Antonius Franciscus Johanne, TROMP, Siegfried Alexander, WINKELS, Koen Gerhardus
Year of Publication 05.01.2023
Get full text
Year of Publication 05.01.2023
Patent
METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A ITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, METHOD OF USE
DE GROOT, Antonius, Franciscus, Johannes, TEN KATE, Nicolaas, STEUR, Michael, Marinus, Anna, TROMP, Siegfried, Alexander, WINKELS, Koen, Gerhardus
Year of Publication 19.10.2022
Get full text
Year of Publication 19.10.2022
Patent
SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS, METHOD FOR MANIPULATING CHARGE DISTRIBUTION AND METHOD FOR PREPARING A SUBSTRATE
BEERENS, Ruud Antonius Catharina Maria, VAN DER VOORT, Dennis Dominic, STEVENS, Lucas Henricus Johannes, TEN KATE, Nicolaas, LEENKNEGT, George Alois Leonie, WINKELS, Koen Gerhardus, HARBERTS, Dirk Willem, BOS, Edwin Johannes Cornelis
Year of Publication 08.12.2022
Get full text
Year of Publication 08.12.2022
Patent