Fast gas exchange apparatus, system, and method
BUCKIUS, DUC DANG, LUDWIG, JEFFREY, MITHUN, ADITI, SCHWARZ, BENJAMIN, XU, MING, OKADA, ASHLEY MUTSUO, WILLWERTH, MICHAEL D
Year of Publication 16.10.2022
Get full text
Year of Publication 16.10.2022
Patent
Capacitive sensor housing for chamber condition monitoring
PAN, YAOLING, TEDESCHI, LEONARD, TAE, PATRICK JOHN, WILLWERTH, MICHAEL D, MCCORMICK, DANIEL THOMAS
Year of Publication 16.09.2021
Get full text
Year of Publication 16.09.2021
Patent
Apparatus and method for monitoring in-situ edge ring erosion
CRIMINALE, PHILLIP A, PAN, YAOLING, TEDESCHI, LEONARD M, DHINDSA, RAJINDER, KRAUS, PHILIP ALLAN, LEE, CHANGHUN, SCHMID, ANDREAS, BYUN, DANIEL SANG, TAE, PATRICK JOHN, WILLWERTH, MICHAEL D, KOOSAU, DENIS M
Year of Publication 01.05.2024
Get full text
Year of Publication 01.05.2024
Patent
Processing tool, resonant process monitor and the method of forming the same
PAN, YAOLING, TEDESCHI, LEONARD, KRAUS, PHILIP ALLAN, SUBRAMANI, ANANTHA, MAO, SHIMIN, WILLWERTH, MICHAEL D, TAE, PATRICK JOHN, KRITHIVASAN, VIJAYKUMAR, CHAN, KELVIN, GOEL, ASHISH, LU, CHIH-SHUN
Year of Publication 11.05.2023
Get full text
Year of Publication 11.05.2023
Patent
SUBSTRATE SUPPORT ASSEMBLY HAVING RAPID TEMPERATURE CONTROL
PANAGOPOULOS THEODOROS, WILLWERTH MICHAEL D, HOLLAND JOHN, MATYUSHKIN ALEXANDER, KATZ DAN
Year of Publication 12.05.2016
Get full text
Year of Publication 12.05.2016
Patent
PROCESSING CHAMBER WITH SUBSTRATE EDGE ENHANCEMENT PROCESSING
TODOROW VALENTIN N, LEE HEAN CHEAL, LI CHENGWEN, WILLWERTH MICHAEL D, KIM HONG-SUN
Year of Publication 25.05.2021
Get full text
Year of Publication 25.05.2021
Patent
SINGLE RING DESIGN FOR HIGH YIELD, SUBSTRATE EXTREME EDGE DEFECT REDUCTION IN ICP PLASMA PROCESSING CHAMBER
LANE ADAM, DAO HUUTRI, NG SIU TANG, LEE CHANGHUN, WILLWERTH MICHAEL D
Year of Publication 07.04.2016
Get full text
Year of Publication 07.04.2016
Patent
Capacitive sensor and processing tool for chamber condition monitoring
PAN, YAOLING, TEDESCHI, LEONARD, ENMAN, LISA J, KRAUS, PHILIP ALLAN, LI, XIAOPU, SALY, MARK JOSEPH, TAE, PATRICK JOHN, BERA, KALLOL, WILLWERTH, MICHAEL D, HICKS III, ALBERT BARRETT, MCCORMICK, DANIEL THOMAS, SUN, JENNIFER
Year of Publication 21.01.2024
Get full text
Year of Publication 21.01.2024
Patent
Substrate processing with rapid temperature gradient control
PANAGOPOULOS THEODOROS, WILLWERTH MICHAEL D, HOLLAND JOHN, MATYUSHKIN ALEXANDER, KATZ DAN
Year of Publication 01.03.2016
Get full text
Year of Publication 01.03.2016
Patent
Processing chamber with substrate edge enhancement processing
LEE, HEAN CHEAL, LEE, CHANGHUN, TODOROW, VALENTIN N, WILLWERTH, MICHAEL D, KIM, HUN SANG
Year of Publication 16.02.2021
Get full text
Year of Publication 16.02.2021
Patent