Reduction of pattern peeling in step-and-flash imprint lithography
Takei, Satoshi, Ogawa, Tsuyoshi, Deschner, Ryan, Willson, Carlton Grant
Published in Microelectronic engineering (25.03.2014)
Published in Microelectronic engineering (25.03.2014)
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Journal Article
10 NM 이하 패터닝을 위한 블록 공중합체
MAHER MICHAEL, BLACHUT GREGORY, WILLSON CARLTON GRANT, ASANO YUSUKE, ELLISON CHRISTOPHER JOHN
Year of Publication 01.11.2018
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Year of Publication 01.11.2018
Patent
ORDERING BLOCK COPOLYMERS
MAHER MICHAEL, WILLSON CARLTON GRANT, ELLISON CHRISTOPHER, BATES CHRISTOPHER, JANES DUSTIN
Year of Publication 22.11.2016
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Year of Publication 22.11.2016
Patent
POLYLACTIDE/SILICON-CONTAINING BLOCK COPOLYMERS FOR NANOLITHOGRAPHY
CUSHEN JULIA, WILLSON CARLTON GRANT, BATES CHRISTOPHER M, ELLISON CHRISTOPHER JOHN
Year of Publication 19.11.2014
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Year of Publication 19.11.2014
Patent
USING CHEMICAL VAPOR DEPOSITED FILMS TO CONTROL DOMAIN ORIENTATION IN BLOCK COPOLYMER THIN FILMS
DURAND WILLIAM J, RAUSCH ERICA L, CUSHEN JULIA, SANTOS LOGAN J, SESHIMO TAKEHIRO, DEAN LEON, WILLSON CARLTON GRANT, BATES CHRISTOPHER M, ELLISON CHRISTOPHER JOHN
Year of Publication 01.12.2014
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Year of Publication 01.12.2014
Patent
Block polymers for sub-10 nm patterning
Asano, Yusuke, Willson, Carlton Grant, Ellison, Christopher John, Blachut, Gregory, Maher, Michael
Year of Publication 26.03.2019
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Year of Publication 26.03.2019
Patent
Polylactide/silicon-containing block copolymers for nanolithography
Ellison Christopher J, Bates Christopher M, Willson Carlton Grant, Cushen Julia
Year of Publication 05.12.2017
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Year of Publication 05.12.2017
Patent
BLOCK COPOLYMERS FOR SUB-10 NM PATTERNING
WILLSON, Carlton, Grant, MAHER, Michael, BLACHUT, Gregory, ELLISON, Christopher, John, ASANO, Yusuke
Year of Publication 31.08.2017
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Year of Publication 31.08.2017
Patent
Block Polymers for Sub-10 NM Patterning
Ellison Christopher John, Asano Yusuke, Blachut Gregory, Willson Carlton Grant, Maher Michael
Year of Publication 24.08.2017
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Year of Publication 24.08.2017
Patent
ORDERING BLOCK COPOLYMERS
WILLSON, Carlton, Grant, MAHER, Michael, JANES, Dustin, ELLISON, Christopher, BATES, Christopher
Year of Publication 23.02.2017
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Year of Publication 23.02.2017
Patent
Polylactide/Silicon-Containing Block Copolymers for Nanolithography
ELLISON CHRISTOPHER J, CUSHEN JULIA, WILLSON CARLTON GRANT, BATES CHRISTOPHER M
Year of Publication 10.12.2015
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Year of Publication 10.12.2015
Patent
ORDERING BLOCK COPOLYMERS
JANES, DUSTIN, ELLISON, CHRISTOPHER, MAHER, MICHAEL, BATES, CHRISTOPHER, WILLSON, CARLTON, GRANT
Year of Publication 24.09.2015
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Year of Publication 24.09.2015
Patent
Polylactide/silicon-containing block copolymers for nanolithography
CUSHEN JULIA, WILLSON CARLTON GRANT, BATES CHRISTOPHER M, ELLISON CHRISTOPHER JOHN
Year of Publication 01.09.2015
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Year of Publication 01.09.2015
Patent
Surface Treatments for Alignment of Block Copolymers
STRAHAN JEFFREY, ELLISON CHRISTOPHER J, WILLSON CARLTON GRANT, BATES CHRISTOPHER M
Year of Publication 27.08.2015
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Year of Publication 27.08.2015
Patent
Method of automatic fluid dispensing for imprint lithography processes
COLBURN MATTHERW E, WILLSON CARLTON GRANT, EKERDT JOHN G, BAILEY TODD C, CHOI BYUNG-JIN, SREENIVASAN SIDLGATA V
Year of Publication 29.12.2015
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Year of Publication 29.12.2015
Patent