Deep ultra-violet lithographic resist composition
MCKEAN, DENNIS RICHARD, TOMPKINS, TERRY CADY, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT, CLECAK, NICHOLAS JEFFRIES
Year of Publication 02.01.1985
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Year of Publication 02.01.1985
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TOP IMAGED RESISTS
CHOW, MING-FEA, YANG, JER-MING, ALLEN, ROBERT DAVID, CHIONG, KAOLIN N, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 18.09.1991
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Year of Publication 18.09.1991
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TERPOLYMER RESIST COMPOSITION
PEDERSON, LESTER ARLYN, GRANT, BARBARA DIANNE, WILLSON, CARLTON GRANT, CHENG, YING YING
Year of Publication 09.05.1984
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Year of Publication 09.05.1984
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Terpolymer resist composition
PEDERSON, LESTER ARLYN, GRANT, BARBARA DIANNE, WILLSON, CARLTON GRANT, CHENG, YING YING
Year of Publication 28.09.1983
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Year of Publication 28.09.1983
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Lithographic method employing thermally stable photoresists with high sensitivity forming a hydogen-bonded network
CHOW, MING-FEA, ITO, HIROSHI, IWAMOTO, NANCY ELLEN, CROCKATT, DALE MURRAY, CONLEY, WILLARD EARL, HEFFERSON, GEORGE JOSEPH, WILLSON, CARLTON GRANT, FRECHET, JEAN-MARIE JOSEPH, BRUNSVOLD, WILLIAM ROSS
Year of Publication 04.01.1995
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Year of Publication 04.01.1995
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TOP IMAGED RESISTS
CHOW, MING-FEA, YANG, JER-MING, ALLEN, ROBERT DAVID, CHIONG, KAOLIN N, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 11.01.1989
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Year of Publication 11.01.1989
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Top imaged resists
CHOW, MING-FEA, YANG, JER-MING, ALLEN, ROBERT DAVID, CHIONG, KAOLIN N, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 07.01.1988
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Year of Publication 07.01.1988
Patent
PHOTORESIST COMPOSITION AND METHOD OF APPLYING SAME
CHOW, MING-FEA, GREEN, DENNIS CLINTON, MILLER, ROBERT DENNIS, SKINNER, MICHAEL PATRICK, CHIONG, KAOLIN N, WILLSON, CARLTON GRANT
Year of Publication 02.12.1987
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Year of Publication 02.12.1987
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Dry developable photoresist compositions and method for use thereof
MCDONALD, SCOTT ARTHUR, KWONG, RANEE WAI-LING, CONLEY, WILLARD EARL, SCHLOSSER, HUBERT, LINEHAN, LEO LAWRENCE, WILLSON, CARLTON GRANT, CLECAK, NICHOLAS JEFFRIES, SACHDEV, HARBANS SINGH
Year of Publication 26.05.1993
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Year of Publication 26.05.1993
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Photoresist composition and method of applying same
CHOW, MING-FEA, GREEN, DENNIS CLINTON, MILLER, ROBERT DENNIS, SKINNER, MICHAEL PATRICK, CHIONG, KAOLIN N, WILLSON, CARLTON GRANT
Year of Publication 25.02.1987
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Year of Publication 25.02.1987
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A POSITIVE RESIST COMPOSITION
MCKEAN, DENNIS RICHARD, TOMPKINS, TERRY CADY, MILLER, ROBERT DENNIS, TWIEG, ROBERT JAMES, WILLSON, CARLTON GRANT, CLECAK, NICHOLAS JEFFRIES
Year of Publication 20.08.1986
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Year of Publication 20.08.1986
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A positive resist composition
MCKEAN, DENNIS RICHARD, TOMPKINS, TERRY CADY, MILLER, ROBERT DENNIS, TWIEG, ROBERT JAMES, WILLSON, CARLTON GRANT, CLECAK, NICHOLAS JEFFRIES
Year of Publication 17.08.1983
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Year of Publication 17.08.1983
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THERMALLY STABLE PHOTORESISTS WITH HIGH SENSITIVITY BACKGROUND OF THE INVENTION
CHOW, MING-FEA, ITO, HIROSHI, IWAMOTO, NANCY ELLEN, CROCKATT, DALE MURRAY, CONLEY, WILLARD EARL, HEFFERSON, GEORGE JOSEPH, WILLSON, CARLTON GRANT, FRECHET, JEAN-MARIE JOSEPH, BRUNSVOLD, WILLIAM ROSS
Year of Publication 25.10.1989
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Year of Publication 25.10.1989
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Thermally stable photoresists with high sensitivity background of the invention
CHOW, MING-FEA, ITO, HIROSHI, IWAMOTO, NANCY ELLEN, CROCKATT, DALE MURRAY, CONLEY, WILLARD EARL, HEFFERSON, GEORGE JOSEPH, WILLSON, CARLTON GRANT, FRECHET, JEAN-MARIE JOSEPH, BRUNSVOLD, WILLIAM ROSS
Year of Publication 03.02.1988
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Year of Publication 03.02.1988
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Photoresist Zusammensetzung
WILLSON, CARLTON GRANT, SAN JOSE, CALIFORNIA 95126, US, CAMERON, JAMES FIELD, PALO ALTO, CALIFORNIA 94306, US, NIESERT, CLAUS-PETER, SAN JOSE, CALIFORNIA 95120, US, MACDONALD, SCOTT ARTHUR, SAN JOSE, CALIFORNIA 95128, US, LEUNG, MAN-KIT, ITHACA, NEW YORK 14850, US, FRECHET, JEAN M. J., ITHACA, NEW YORK 14850, US
Year of Publication 10.10.1996
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Year of Publication 10.10.1996
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Mit Trockenverfahren entwickelbare Photoresistzusammensetzungen und Verfahren zur Verwendung
MCDONALD, SCOTT ARTHUR, KWONG, RANEE WAI-LING, CONLEY, WILLARD EARL, SCHLOSSER, HUBERT, LINEHAN, LEO LAWRENCE, WILLSON, CARLTON GRANT, CLECAK, NICHOLAS JEFFRIES, SACHDEV, HARBANS SINGH
Year of Publication 17.08.2000
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Year of Publication 17.08.2000
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METODO LITOGRAFICO QUE EMPLEA FOTO-RESERVAS TERMICAMENTE ESTABLES DE ALTA SENSIBILIDAD QUE FORMAN UN RETICULO CON ENLACES DE HIDROGENO
CHOW, MING-FEA, ITO, HIROSHI, IWAMOTO, NANCY ELLEN, CROCKATT, DALE MURRAY, CONLEY, WILLARD EARL, HEFFERSON, GEORGE JOSEPH, WILLSON, CARLTON GRANT, FRECHET, JEAN-MARIE JOSEPH, BRUNSVOLD, WILLIAM ROSS
Year of Publication 01.03.1995
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Year of Publication 01.03.1995
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