A PROCESS FOR GENERATING A POSITIVE TONE PHOTORESIST
ITO, HIROSHI, FRECHET, JEAN M. J, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 28.09.1988
Get full text
Year of Publication 28.09.1988
Patent
Negative resist compositions
ALLEN, ROBERT DAVID, FRECHET, JEAN M J, TWIEG, ROBERT JAMES, WILLSON, CARLTON GRANT
Year of Publication 21.09.1988
Get full text
Year of Publication 21.09.1988
Patent
RESIST STRUCTURE AND PROCESSES FOR MAKING AND PATTERNING IT
PEDERSON, LESTER ARLYN, HOFER, DONALD CLIFFORD, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT, HIRAOKA, HIROYUKI
Year of Publication 04.05.1988
Get full text
Year of Publication 04.05.1988
Patent
DEEP ULTRA-VIOLET LITHOGRAPHIC RESIST COMPOSITION
MCKEAN, DENNIS RICHARD, TOMPKINS, TERRY CADY, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT, CLECAK, NICHOLAS JEFFRIES
Year of Publication 11.11.1987
Get full text
Year of Publication 11.11.1987
Patent
A PROCESS FOR PRODUCING A NEGATIVE TONE RESIST IMAGE
ITO, HIROSHI, MILLER, ROBERT DENNIS, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 28.10.1987
Get full text
Year of Publication 28.10.1987
Patent
A process for generating a positive tone photoresist
ITO, HIROSHI, FRECHET, JEAN M. J, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 29.07.1987
Get full text
Year of Publication 29.07.1987
Patent
A POSITIVE LITHOGRAPHIC RESIST COMPOSITION
ECONOMY, JAMES, MCKEAN, DENNIS RICHARD, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT
Year of Publication 04.03.1987
Get full text
Year of Publication 04.03.1987
Patent
Apparatus and method for determining focus correction for a lithographic tool
JULIANA, ANTHONY, JR, SINCERBOX, GLENN TAVERNIA, WILLSON, CARLTON GRANT, LATTA, MILTON RUSSELL
Year of Publication 29.10.1986
Get full text
Year of Publication 29.10.1986
Patent
TERPOLYMER RESIST COMPOSITION
PEDERSON, LESTER ARLYN, GRANT, BARBARA DIANNE, WILLSON, CARLTON GRANT, CHENG, YING YING
Year of Publication 20.08.1986
Get full text
Year of Publication 20.08.1986
Patent
A process for producing a negative tone resist image
ITO, HIROSHI, MILLER, ROBERT DENNIS, MACDONALD, SCOTT ARTHUR, WILLSON, CARLTON GRANT
Year of Publication 21.11.1985
Get full text
Year of Publication 21.11.1985
Patent
RESIST STRUCTURE AND PROCESSES FOR MAKING AND PATTERNING IT
PEDERSON, LESTER ARLYN, HOFER, DONALD CLIFFORD, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT, HIRAOKA, HIROYUKI
Year of Publication 21.11.1985
Get full text
Year of Publication 21.11.1985
Patent
A positive lithographic resist composition
ECONOMY, JAMES, MCKEAN, DENNIS RICHARD, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT
Year of Publication 10.07.1985
Get full text
Year of Publication 10.07.1985
Patent
Resist structure and processes for making and patterning it
PEDERSON, LESTER ARLYN, HOFER, DONALD CLIFFORD, MILLER, ROBERT DENNIS, WILLSON, CARLTON GRANT, HIRAOKA, HIROYUKI
Year of Publication 09.01.1985
Get full text
Year of Publication 09.01.1985
Patent