DIFFUSIE-OVEN EN WERKWIJZE VOOR DE TEMPERATUURGELEIDING
GREGOR, SABINE, KOECKERT, CHRISTOPH, ALBERTS, VIVIAN, HECHT, HANSRISTIAN, WILLKOMMEN, UDO
Year of Publication 07.06.2010
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Year of Publication 07.06.2010
Patent
Drive unit for transport device of vacuum processing system, has traction element guided around two deflecting rollers, where traction element comprises continuous stainless steel strip
WILLKOMMEN, UDO, KENNE, MARCO, HENTSCHEL, MICHAEL, WAYDBRINK, HUBERTUS VON DER
Year of Publication 15.04.2010
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Year of Publication 15.04.2010
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Method for guiding the temperature in a diffusion oven comprises using an average temperature rise which is larger than a first average rise of a first linear or non-linear temperature-time function progression
KOECKERT, CHRISTOPH, ALBERTS, VIVIAN, HECHT, HANSRISTIAN, WILLKOMMEN, UDO
Year of Publication 10.06.2009
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Year of Publication 10.06.2009
Patent
Diffusion oven useful in semiconductor manufacture and for doping solar cells, comprises reactor enclosed by reaction pipe, outer casing, heating elements, means for locking the pipe, means for locking the casing and vacuum producing means
GREGOR, SABINE, KOECKERT, CHRISTOPH, ALBERTS, VIVIAN, HECHT, HANSRISTIAN, WILLKOMMEN, UDO
Year of Publication 30.04.2009
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Year of Publication 30.04.2009
Patent
Diffusie-oven en werkwijze voor de temperatuurgeleiding
UDO WILLKOMMEN, VIVIAN ALBERTS, CHRISTOPH KOECKERT, SABINE GREGOR, HANSRISTIAN HECHT
Year of Publication 28.04.2009
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Year of Publication 28.04.2009
Patent