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Year of Publication 09.09.2008
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Bi-layer etch stop process for defect reduction and via stress migration improvement
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Bi-layer etch stop process for defect reduction and via stress migration improvement
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Year of Publication 14.06.2007
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Bi-layer etch stop process for defect reduction and via stress migration improvement
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Year of Publication 03.04.2007
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Bi-layer etch stop process for defect reduction and via stress migration improvement
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Year of Publication 03.04.2007
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Year of Publication 03.04.2007
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Bi-layer etch stop process for defect reduction and via stress migration improvement
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Year of Publication 15.12.2005
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Year of Publication 14.07.2009
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Year of Publication 14.07.2009
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Plasma processes for depositing low dielectric constant films
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Year of Publication 10.12.2008
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Plasma processes for depositing low dielectric constant films
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Year of Publication 04.07.2007
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Year of Publication 28.04.2005
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Year of Publication 09.01.2007
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Year of Publication 14.12.2004
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