Correction of spherical surface measurements by confocal microscopy
Béguelin, Jeremy, Scharf, Toralf, Noell, Wilfried, Voelkel, Reinhard
Published in Measurement science & technology (01.07.2020)
Published in Measurement science & technology (01.07.2020)
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Journal Article
Coherent Ray Tracing Simulation Of Non-Imaging Laser Beam Shaping With Multi-Aperture Elements
Kirner, Raoul, Noell, Wilfried, Scharf, Toralf, Voelkel, Reinhard
Published in EPJ Web of Conferences (2019)
Published in EPJ Web of Conferences (2019)
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Journal Article
Conference Proceeding
Fabrication and characterization of linear diffusers based on concave micro lens arrays
Bitterli, Roland, Scharf, Toralf, Herzig, Hans-Peter, Noell, Wilfried, de Rooij, Nico, Bich, Andreas, Roth, Sylvain, Weible, Kenneth J, Voelkel, Reinhard, Zimmermann, Maik, Schmidt, Michael
Published in Optics express (21.06.2010)
Published in Optics express (21.06.2010)
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Journal Article
Large micro-mirror arrays: key components in future space instruments for Universe and Earth Observation
Zamkotsian, Frederic, Lanzoni, Patrick, Canonica, Michael, Noell, Wilfried, Lani, Sebastien
Published in MATEC Web of Conferences (01.01.2015)
Published in MATEC Web of Conferences (01.01.2015)
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Journal Article
Conference Proceeding
Improvements on the uniformity of large-area microlens arrays in Fused Silica
Kirner, Raoul, Béguelin, Jeremy, Eisner, Martin, Noell, Wilfried, Scharf, Toralf, Voelkel, Reinhard
Published in Optics express (04.03.2019)
Published in Optics express (04.03.2019)
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Journal Article
Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source
Vetter, Andreas, Kirner, Raoul, Opalevs, Dmitrijs, Scholz, Matthias, Leisching, Patrick, Scharf, Toralf, Noell, Wilfried, Rockstuhl, Carsten, Voelkel, Reinhard
Published in Optics express (20.08.2018)
Published in Optics express (20.08.2018)
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Journal Article
Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization
Béguelin, Jeremy, Symeonidis, Michael, Noell, Wilfried, Voelkel, Reinhard, Scharf, Toralf
Published in Applied optics. Optical technology and biomedical optics (20.04.2020)
Published in Applied optics. Optical technology and biomedical optics (20.04.2020)
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Journal Article
Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography
Vetter, Andreas, Yan, Chen, Kirner, Raoul, Scharf, Toralf, Noell, Wilfried, Voelkel, Reinhard, Rockstuhl, Carsten
Published in Optics express (28.10.2019)
Published in Optics express (28.10.2019)
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Journal Article
Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm
Kirner, Raoul, Vetter, Andreas, Opalevs, Dmitrijs, Gilfert, Christian, Scholz, Matthias, Leisching, Patrick, Scharf, Toralf, Noell, Wilfried, Rockstuhl, Carsten, Voelkel, Reinhard
Published in Optics express (22.01.2018)
Published in Optics express (22.01.2018)
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Journal Article
Refraction limit of miniaturized optical systems: a ball-lens example
Kim, Myun-Sik, Scharf, Toralf, Mühlig, Stefan, Fruhnert, Martin, Rockstuhl, Carsten, Bitterli, Roland, Noell, Wilfried, Voelkel, Reinhard, Herzig, Hans Peter
Published in Optics express (04.04.2016)
Published in Optics express (04.04.2016)
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Journal Article
A dual-axis pointing mirror with moving-magnet actuation
Ataman, Ça lar, Lani, Sébastien, Noell, Wilfried, de Rooij, Nico
Published in Journal of micromechanics and microengineering (01.02.2013)
Published in Journal of micromechanics and microengineering (01.02.2013)
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Journal Article
Miniature lamellar grating interferometer based on silicon technology
Manzardo, Omar, Michaely, Roland, Schädelin, Felix, Noell, Wilfried, Overstolz, Thomas, De Rooij, Nico, Herzig, Hans Peter
Published in Optics letters (01.07.2004)
Published in Optics letters (01.07.2004)
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Journal Article
Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper
Extermann, Jérôme, Weber, Stefan M, Kiselev, Denis, Bonacina, Luigi, Lani, Sébastien, Jutzi, Fabio, Noell, Wilfried, de Rooij, Nico F, Wolf, Jean-Pierre
Published in Optics express (11.04.2011)
Published in Optics express (11.04.2011)
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Journal Article
Ultraviolet and near-infrared femtosecond temporal pulse shaping with a new high-aspect-ratio one-dimensional micromirror array
Weber, Stefan M, Extermann, Jérôme, Bonacina, Luigi, Noell, Wilfried, Kiselev, Denis, Waldis, Severin, de Rooij, Nico F, Wolf, Jean-Pierre
Published in Optics letters (15.09.2010)
Published in Optics letters (15.09.2010)
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Journal Article
MEMS compatible micro-GRIN lenses for fiber to chip coupling of light
Zickar, Michael, Noell, Wilfried, Marxer, Cornel, de Rooij, Nico
Published in Optics express (15.05.2006)
Published in Optics express (15.05.2006)
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Journal Article
Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
Weber, Stefan M, Bonacina, Luigi, Noell, Wilfried, Kiselev, Denis, Extermann, Jérôme, Jutzi, Fabio, Lani, Sébastien, Nenadl, Ondrej, Wolf, Jean-Pierre, de Rooij, Nico F
Published in Review of scientific instruments (01.07.2011)
Published in Review of scientific instruments (01.07.2011)
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