리소그래피 장치, 리소그래피 투영 장치 및 디바이스 제조 방법
LOOPSTRA ERIK ROELOF, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, BUTLER HANS, GEUPPERT BERNHARD MATHIAS
Year of Publication 05.03.2019
Get full text
Year of Publication 05.03.2019
Patent
능동 베이스 프레임 지지부를 갖는 리소그래피 장치
BUKKEMS BJORN HUBERTUS MARIA, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, BUTLER HANS, DE HOON CORNELIUS ADRIANUS LAMBERTUS
Year of Publication 29.08.2018
Get full text
Year of Publication 29.08.2018
Patent
베어링 디바이스, 자기 중력 보상기, 진동 분리 시스템, 리소그래피 장치, 네거티브 강성을 갖는 중력 보상기를 제어하는 방법, 및 스프링
FISCHER OLOF MARTINUS JOSEPHUS, VENNAT ERIC PIERRE YVES, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, HUIZINGA THEODORUS MATTHEUS JOANNUS MARIA, BUTLER HANS, HOOGENDAM CHRISTIAAN ALEXANDER, KIMMAN MAARTEN HARTGER, ROVERS JOHANNES MARINUS MARIA
Year of Publication 01.11.2019
Get full text
Year of Publication 01.11.2019
Patent
Lithographic apparatus
WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, BUTLER HANS, VERVOORDELDONK MICHAEL JOHANNES
Year of Publication 11.10.2022
Get full text
Year of Publication 11.10.2022
Patent
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
Huizinga, Theodorus Mattheus Joannus Maria, Wijckmans, Maurice Willem Jozef Etienne, Butler, Hans, Fischer, Olof Martinus Josephus, Hoogendam, Christiaan Alexander, Rovers, Johannes Marinus Maria, Vennat, Eric Pierre-Yves, Kimman, Maarten Hartger
Year of Publication 08.06.2021
Get full text
Year of Publication 08.06.2021
Patent
Lithographic apparatus with active chassis support
BUKKEMS BJORN HUBERTUS MARIA, MAURICE WILLEM JOZEF ETIENNE WIJCKMANS, BUTLER HANS, CORNELIUS ADRIANUS LAMBERTUS DE HOON
Year of Publication 15.06.2021
Get full text
Year of Publication 15.06.2021
Patent
Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus
LOOPSTRA ERIK ROELOF, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, KOEVOETS ADRIANUS HENDRIK, TOUSAIN ROBERTUS LEONARDUS
Year of Publication 30.10.2012
Get full text
Year of Publication 30.10.2012
Patent