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LIEW SAN LEONG, ZHANG BEI CHAO, CHEN TONG QING, WIDODO JOHNNY, SUDIJONO JOHN, HSIA LIANG CHOO, SIEW YONG KONG, ZHANG FAN
Year of Publication 28.04.2009
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Year of Publication 28.04.2009
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Entire encapsulation of Cu interconnects using self-aligned CuSiN film
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Year of Publication 28.04.2009
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Year of Publication 28.04.2009
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METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
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Year of Publication 16.04.2009
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Nested and isolated transistors with reduced impedance difference
Widodo, Johnny, Hsia, Liang Choo, Lee, James Yong Meng, Gao, Wen Zhi, Lun, Zhao, Liu, Huang, Lai, Chung Woh, Mishra, Shailendra, Chow, Yew Tuck, Chen, Fang, Ong, Shiang Yang
Year of Publication 03.08.2010
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Year of Publication 03.08.2010
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Nested and isolated transistors with reduced impedance difference
GAO WEN ZHI, LUN ZHAO, CHEN FANG, ONG SHIANG YANG, WIDODO JOHNNY, LAI CHUNG WOH, CHOW YEW TUCK, MISHRA SHAILENDRA, HSIA LIANG CHOO, LEE JAMES YONG MENG, LIU HUANG
Year of Publication 03.08.2010
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Year of Publication 03.08.2010
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A METHOD OF CONTROLLED LOW-K VIA ETCH FOR CU INTERCONNECTIONS
WAH NG HAN, WIDODO JOHNNY, JUNG TANG TECK, HUI LI JUNG, WUPING LIU, WENDT HERMANN, CLEVENGER LARRY A
Year of Publication 28.11.2008
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Year of Publication 28.11.2008
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Method of controlled low-k via etch for Cu interconnections
TANG TECK JUNG, WIDODO JOHNNY, NG HAN WAH, WENDT HERMANN, LI JING HUI, CLEVENGER LARRY A, LIU WUPING
Year of Publication 23.10.2008
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Year of Publication 23.10.2008
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BEOL INTERCONNECT STRUCTURES WITH IMPROVED RESISTANCE TO STRESS
NGUYEN SON V, WIDODO JOHNNY, LIU XIAO H, SHAW THOMAS M, GATES STEPHEN M, KIM JAE H, DIMITRAKOPOULOS CHRISTOS D, RESTAINO DARRYL D, LANE MICHAEL W, BONILLA GRISELDA
Year of Publication 29.09.2008
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Year of Publication 29.09.2008
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BEOL INTERCONNECT STRUCTURES WITH IMPROVED RESISTANCE TO STRESS
NGUYEN SON V, LIU XIAO H, WIDODO JOHNNY, SHAW THOMAS M, GATES STEPHEN M, KIM JAE H, DIMITRAKOPOULOS CHRISTOS D, RESTAINO DARRYL D, LANE MICHAEL W, BONILLA GRISELDA
Year of Publication 21.08.2008
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Year of Publication 21.08.2008
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NESTED AND ISOLATED TRANSISTORS WITH REDUCED IMPEDANCE DIFFERENCE
JAMES LEE YONG MENG, WOH LAI CHUNG, TUCK CHOW YEW, ZHAO LUN, HUANG LIU, FANG CHEN, WIDODO JOHNNY, CHOO HSIA LIANG, ZHI GAO WEN, YANG ONG SHIANG, MISHRA SHAILENDRA
Year of Publication 30.09.2009
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Year of Publication 30.09.2009
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NESTED AND ISOLATED TRANSISTORS WITH REDUCED IMPEDANCE DIFFERENCE
GAO WEN ZHI, LUN ZHAO, CHEN FANG, ONG SHIANG YANG, WIDODO JOHNNY, LAI CHUNG WOH, CHOW YEW TUCK, MISHRA SHAILENDRA, HSIA LIANG CHOO, LEE JAMES YONG MENG, LIU HUANG
Year of Publication 20.08.2009
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Year of Publication 20.08.2009
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ENTIRE ENCAPSULATION OF CU INTERCONNECTS USING SELF-ALIGNED CUSIN FILM
LEONG LIEW SAN, CHAO ZHANG BEI, WIDODO JOHNNY, FAN ZHANG, CHOO HSIA LIANG, KONG SIEW YONG, SUDIJONO JOHN, QING CHEN TONG
Year of Publication 28.09.2007
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Year of Publication 28.09.2007
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