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SUPERCONDUCTIVE MAGNET ASSEMBLY, PLANAR MOTOR AND LITHOGRAPHIC APPARATUS
by
JEROEN VAN DUIVENBODE
,
GUDRUN GHILAINE AGNES DE GERSEM
,
ROGER FRANCISCUS MATTHEUS MARIA HAMELINCK
,
RIEN JOHAN HEIN WESSELINK
,
EMIEL ANTON VAN DE VEN
Year of Publication
27.02.2024
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Superconductive magnet assembly, planar motor and lithographic apparatus
by
DE GERSEM, GUDRUN GHILAINE AGNES
,
HAMELINCK, ROGER FRANCISCUS MATTHEUS MARIA
,
VAN DE VEN, EMIEL ANTON
,
VAN DUIVENBODE, JEROEN
,
WESSELINK
,
RIEN JOHAN HEIN
Year of Publication
16.06.2024
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apparatus specially adapted therefor
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esp@cenet
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