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Storage element having composite contact plug and mfg method
by
BORU XU
,
KAAKIRA FUKUZUMI
,
WENZHNOG LIU
Year of Publication
09.06.2004
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Storage element having composite contact plug and mfg method
by
WENZHNOG
,XU
LIU
Year of Publication
15.02.2006
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Patent
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Patent
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chemistry
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basic electric elements
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electric solid state devices not otherwise provided for
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electricity
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semiconductor devices
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esp@cenet
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