정전식 클램프를 포함하는 오브젝트 테이블
WANG YIXIANG, RONDE MICHAEL JOHANNES CHRISTIAAN, VAN DER TOORN JAN GERARD CORNELIS, WELLINK ARNO MARIA, KOOIKER ALLARD EELCO, HUINCK JEROEN GERTRUDA ANTONIUS, CHEN CHIA YAO, ZHU BOHANG, LIU SHIBING, SEVERT HAN WILLEM HENDRIK, LUO YING, VAN SOEST JURGEN
Year of Publication 19.07.2021
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Year of Publication 19.07.2021
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Object table comprising an electrostatic clamp
Huinck, Jeroen Gertruda Antonius, Van Der Toorn, Jan-Gerard Cornelis, Van Soest, Jurgen, Wellink, Arno Maria, Severt, Han Willem Hendrik, Liu, Shibing, Luo, Ying, Kooiker, Allard Eelco, Wang, Yixiang, Ronde, Michael Johannes Christiaan, Chen, Chia-Yao, Zhu, Bohang
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
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OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
SEVERT, Han Willem Hendrik, VAN SOEST, Jurgen, KOOIKER, Allard Eelco, CHEN, Chia-Yao, VAN DER TOORN, Jan-Gerard Cornelis, HUINCK, Jeroen Gertruda Antonius, LIU, Shibing, RONDE, Michael Johannes Christiaan, WELLINK, Arno Maria, LUO, Ying, WANG, Yixiang, ZHU, Bohang
Year of Publication 03.08.2023
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Year of Publication 03.08.2023
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Object table comprising an electrostatic clamp
Huinck, Jeroen Gertruda Antonius, Van Der Toorn, Jan-Gerard Cornelis, Van Soest, Jurgen, Wellink, Arno Maria, Severt, Han Willem Hendrik, Liu, Shibing, Luo, Ying, Kooiker, Allard Eelco, Wang, Yixiang, Ronde, Michaël Johannes Christiaan, Chen, Chia-Yao, Zhu, Bohang
Year of Publication 25.04.2023
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Year of Publication 25.04.2023
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OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
VAN DER TOORN, Jan-Gerard, Cornelis, SEVERT, Han, Willem, Hendrik, VAN SOEST, Jurgen, WELLINK, Arno, Maria, CHEN, Chia-Yao, RONDE, Michaël, Johannes, Christiaan, LIU, Shibing, KOOIKER, Allard, Eelco, LUO, Ying, HUINCK, Jeroen, Gertruda, Antonius, WANG, Yixiang, ZHU, Bohang
Year of Publication 27.10.2021
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Year of Publication 27.10.2021
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OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
SEVERT, Han Willem Hendrik, VAN SOEST, Jurgen, KOOIKER, Allard Eelco, CHEN, Chia-Yao, VAN DER TOORN, Jan-Gerard Cornelis, RONDE, Michaël Johannes Christiaan, HUINCK, Jeroen Gertruda Antonius, LIU, Shibing, WELLINK, Arno Maria, LUO, Ying, WANG, Yixiang, ZHU, Bohang
Year of Publication 07.10.2021
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Year of Publication 07.10.2021
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Object table and related apparatus
KOOIKER, ALLARD EELCO, LIU, SHIBING, WELLINK, ARNO MARIA, CHEN, CHIA-YAO, VAN DER TOORN, JAN-GERARD CORNELIS, SEVERT, HAN WILLEM HENDRIK, WANG, YIXIANG, LUO, YING, ZHU, BOHANG, HUINCK, JEROEN GERTRUDA ANTONIUS, RONDE, MICHAEL JOHANNES CHRISTIAAN, VAN SOEST, JURGEN
Year of Publication 21.06.2024
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Year of Publication 21.06.2024
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Object table, apparatus comprising an object table and method for unloading an object from an electrostatic clamp
KOOIKER, ALLARD EELCO, LIU, SHIBING, WELLINK, ARNO MARIA, CHEN, CHIA-YAO, VAN DER TOORN, JAN-GERARD CORNELIS, SEVERT, HAN WILLEM HENDRIK, WANG, YIXIANG, LUO, YING, ZHU, BOHANG, HUINCK, JEROEN GERTRUDA ANTONIUS, RONDE, MICHAEL JOHANNES CHRISTIAAN, VAN SOEST, JURGEN
Year of Publication 01.03.2024
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Year of Publication 01.03.2024
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Object table
ZHU, BO-HANG, KOOIKER, ALLARD EELCO, WELLINK, ARNO MARIA, CHEN, CHIA-YAO, VAN DER TOORN, JAN-GERARD CORNELIS, SEVERT, HAN WILLEM HENDRIK, WANG, YIXIANG, LUO, YING, HUINCK, JEROEN GERTRUDA ANTONIUS, RONDE, MICHAEL JOHANNES CHRISTIAAN, LIU, SHI-BING, VAN SOEST, JURGEN
Year of Publication 16.11.2022
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Year of Publication 16.11.2022
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OBJECT TABLE COMPRISING ELECTROSTATIC CLAMP
WANG YIXIANG, WELLINK ARNO MARIA, KOOIKER ALLARD EELCO, HUINCK JEROEN GERTRUDA ANTONIUS, ZHU BOHANG, LIU SHIBING, CHEN CHIA-YAO, RONDE MICHAËL, VAN DER TOORN JAN-GERARD, SEVERT HAN WILLEM HENDRIK, LUO YING, VAN SOEST JURGEN
Year of Publication 26.11.2021
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Year of Publication 26.11.2021
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Object table
ZHU, BO-HANG, KOOIKER, ALLARD EELCO, WELLINK, ARNO MARIA, CHEN, CHIA-YAO, VAN DER TOORN, JAN-GERARD CORNELIS, SEVERT, HAN WILLEM HENDRIK, WANG, YIXIANG, LUO, YING, HUINCK, JEROEN GERTRUDA ANTONIUS, RONDE, MICHAEL JOHANNES CHRISTIAAN, LIU, SHI-BING, VAN SOEST, JURGEN
Year of Publication 16.10.2020
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Year of Publication 16.10.2020
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