Thickened sidewall dielectric for memory cell
Weimer, Ronald A, Min, Kyu S, Ramaswamy, Durai Vishak Nirmal, Graettinger, Thomas M
Year of Publication 22.02.2022
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Year of Publication 22.02.2022
Patent
Contrasting single-wafer and batch processing for memory devices : Single-wafer manufacturing in the nanochip era
WEIMER, Ronald A, EPPICH, Denise Marra, BEAMAN, Kevin L, POWELL, D. Carl, GONZALEZ, Fernando
Published in IEEE transactions on semiconductor manufacturing (2003)
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Published in IEEE transactions on semiconductor manufacturing (2003)
Journal Article
Thickened Sidewall Dielectric for Memory Cell
Weimer, Ronald A, Min, Kyu S, Ramaswamy, Durai Vishak Nirmal, Graettinger, Thomas M
Year of Publication 25.06.2020
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Year of Publication 25.06.2020
Patent
Thickened sidewall dielectric for memory cell
Weimer, Ronald A, Min, Kyu S, Ramaswamy, Durai Vishak Nirmal, Graettinger, Thomas M
Year of Publication 31.03.2020
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Year of Publication 31.03.2020
Patent