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Year of Publication 02.06.2023
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Year of Publication 02.06.2023
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고 전력 펄싱된 저 주파수 RF에 의한 고 선택도, 저 응력, 및 저 수소 다이아몬드-유사 탄소 하드 마스크들
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Year of Publication 06.01.2022
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실리콘-함유 전구체 및 탄소-함유 전구체를 사용한 탄화 실리콘 막들의 리모트 플라즈마 기반 증착
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Year of Publication 05.03.2021
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Year of Publication 05.03.2021
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저압에서의 고밀도, 고모듈러스, 및 고경도 비정질 탄소 막들
WEIMER MATTHEW SCOTT, PUTHENKOVILAKAM RAGESH, XUE JUN, MANUMPIL MARY ANNE, ZHAO XIZHU, MACDONALD GORDON ALEX, ZHANG SHAOQING, TAN SAMANTHA S.H, HSU CHIN JUI, HUDSON ERIC A, LEE SHIH KED
Year of Publication 25.04.2022
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Year of Publication 25.04.2022
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DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 11.07.2024
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Year of Publication 11.07.2024
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DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 25.04.2024
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Year of Publication 25.04.2024
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Depositing a carbon hardmask by high power pulsed low frequency RF
Weimer, Matthew Scott, Subramonium, Pramod, Puthenkovilakam, Ragesh, Bai, Rujun, French, David
Year of Publication 05.12.2023
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Year of Publication 05.12.2023
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DEPOSITION RATE ENHANCEMENT OF AMORPHOUS CARBON HARD MASK FILM BY PURELY CHEMICAL MEANS
Weimer, Matthew Scott, Hsu, Chin-Jui, Puthenkovilakam, Ragesh, Reddy, Kapu Sirish
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
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