Method for improving mask layout and fabrication
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Year of Publication 07.10.2008
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Year of Publication 02.03.2010
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System and method for product yield prediction
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Year of Publication 02.03.2010
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Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure
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Year of Publication 26.12.2006
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Year of Publication 26.12.2006
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Extraction method of defect density and size distributions
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Year of Publication 04.04.2006
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Year of Publication 04.04.2006
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Extraction method of defect density and size distributions
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Year of Publication 04.04.2006
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Year of Publication 04.04.2006
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Integrated circuit containing DOEs of NCEM-enabled fill cells
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Year of Publication 16.09.2017
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System And Method For Product Yield Prediction
LEE SHERRY F, STINE BRIAN E, MICHAELS KIMON, DAVIS JOSEPH C, HESS CHRISTOPHER, KIBARIAN JOHN, STASHOWER DAVID M, WEILAND LARG H, CIPLICKAS DENNIS J, MOZUMDER PURNENDU K
Year of Publication 13.11.2008
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Year of Publication 13.11.2008
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EXTRACTION METHOD OF DEFECT DENSITY AND SIZE DISTRIBUTIONS
STASHOWER, DAVID, BURCH, RICHARD, HESS, CHRISTOPHER, WEILAND, LARG, H, CIPLICKAS, DENIS, J, STINE, BRIAN, E
Year of Publication 08.06.2005
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Year of Publication 08.06.2005
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Test structures for estimating dishing and erosion effects in copper damascene technology
STINE BRIAN E, HESS CHRISTOPHER, DECKER MARKUS, WEILAND LARG H, CIPLICKAS DENNIS J
Year of Publication 05.01.2005
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Year of Publication 05.01.2005
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System and method for product yield prediction using a logic characterization vehicle
STINE BRIAN E, HESS CHRISTOPHER, KIBARIAN JOHN, WEILAND LARG H, CIPLICKAS DENNIS J
Year of Publication 21.12.2004
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Year of Publication 21.12.2004
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System and method for product yield prediction using a logic characterization vehicle
Stine, Brian E, Hess, Christopher, Weiland, Larg H, Ciplickas, Dennis J, Kibarian, John
Year of Publication 21.12.2004
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Year of Publication 21.12.2004
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Test structures for estimating dishing and erosion effects in copper damascene technology
STINE BRIAN E, HESS CHRISTOPHER, DECKER MARKUS, WEILAND LARG H, CIPLICKAS DENNIS J
Year of Publication 25.11.2004
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Year of Publication 25.11.2004
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System and method for product yield prediction
LEE SHERRY F, STINE BRIAN E, MICHAELS KIMON, DAVIS JOSEPH C, HESS CHRISTOPHER, KIBARIAN JOHN, STASHOWER DAVID M, WEILAND LARG H, CIPLICKAS DENNIS J, MOZUMDER PURNENDU K
Year of Publication 13.05.2008
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Year of Publication 13.05.2008
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System and method for product yield prediction
Stine, Brian E, Hess, Christopher, Kibarian, John, Michaels, Kimon, Davis, Joseph C, Mozumder, Purnendu K, Lee, Sherry F, Weiland, Larg H, Ciplickas, Dennis J, Stashower, David M
Year of Publication 13.05.2008
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Year of Publication 13.05.2008
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System and method for product yield prediction
LEE SHERRY F, STINE BRIAN E, MICHAELS KIMON, DAVIS JOSEPH C, HESS CHRISTOPHER, KIBARIAN JOHN, STASHOWER DAVID M, WEILAND LARG H, CIPLICKAS DENNIS J, MOZUMDER PURNENDU K
Year of Publication 08.04.2008
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Year of Publication 08.04.2008
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