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Year of Publication 30.07.2015
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Year of Publication 05.05.2015
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Multi-zone temperature control for semiconductor wafer
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Year of Publication 07.01.2015
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MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
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Year of Publication 04.07.2013
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Year of Publication 04.07.2013
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Multi-zone temperature control for semiconductor wafer
LIN JIH-JSE, CHANG CHUN-LIN, WEI ZINANG, MOU JONG-I, CHERN CHYI-SHYUAN, FAN MING-YU, WANG JO-FEI, WU HSIN-HSIEN, YEH JUN-LIN, YANG CHI-MING
Year of Publication 26.03.2013
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Year of Publication 26.03.2013
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High selectivity etching process for metal gate N/P patterning
TSAI FANG WEN, WEI ZINANG, CHERN CHYI-SHYUAN, YEH MATT, LIN SHUN WU, CHEN CHIUN, WANG MING-JUN
Year of Publication 08.06.2010
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Year of Publication 08.06.2010
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