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Roller groups for grinding devices, grinding devices, and methods

Roller groups for grinding devices, grinding devices, and methods

by RICKENBACH, Daniel, HOLENSTEIN, Phillipe, STUDERUS, Lukas, MARK, Daniel, WEBER, Heribert
Year of Publication 24.12.2020

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Patent

Hybrid integrated component and process for its production

Hybrid integrated component and process for its production

by WEBER, HERIBERT
Year of Publication 11.07.2017

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Patent

DISPOSITIVO PER L'EROGAZIONE DI UNA SOSTANZA

DISPOSITIVO PER L'EROGAZIONE DI UNA SOSTANZA

by WAHL, RUBEN, WEBER, HERIBERT, SCHEURLE, ANDREAS
Year of Publication 22.02.2019

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Patent

Method for manufacturing a hybrid integrated component

Method for manufacturing a hybrid integrated component

by WEBER HERIBERT, CLASSEN JOHANNES
Year of Publication 30.06.2015

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Patent

MICROMECHANICAL COMPONENT HAVING EUTECTIC BOND BETWEEN TWO SUBSTRATES AND METHOD FOR PRODUCING SUCH A MICROMECHANICAL COMPONENT

MICROMECHANICAL COMPONENT HAVING EUTECTIC BOND BETWEEN TWO SUBSTRATES AND METHOD FOR PRODUCING SUCH A MICROMECHANICAL COMPONENT

by WEBER, HERIBERT, GONSKA, JULIAN
Year of Publication 10.06.2015

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Patent

MILLING DEVICE

MILLING DEVICE

by Mark, Daniel, Studerus, Lukas, Rickenbach, Daniel, Holenstein, Phillipe, Weber, Heribert
Year of Publication 07.10.2020

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Patent

Verfahren zum Ätzen einer Opferschicht für die Herstellung einer mikromechanischen Struktur und mikromechanische Vorrichtung

Verfahren zum Ätzen einer Opferschicht für die Herstellung einer mikromechanischen Struktur und mikromechanische Vorrichtung

by Reinmuth, Jochen, Weber, Heribert
Year of Publication 25.06.2020

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Patent

ROLLER PACKAGES FOR MILLING DEVICES, MILLING DEVICES AND METHOD

ROLLER PACKAGES FOR MILLING DEVICES, MILLING DEVICES AND METHOD

by RICKENBACH, Daniel, STUDERUS, Lukas, MARK, Daniel, HOLENSTEIN, Philippe, WEBER, Heribert
Year of Publication 19.08.2020

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Patent

Micromechanical component and method for producing a micromechanical component

Micromechanical component and method for producing a micromechanical component

by GONSKA JULIAN, WEBER HERIBERT
Year of Publication 18.02.2015

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Patent

MICROMECHANICAL ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN ACCELERATION SENSOR

MICROMECHANICAL ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN ACCELERATION SENSOR

by WEBER HERIBERT
Year of Publication 09.12.2010

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Patent

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

by Senz, Volkmar, Hermes, Christoph, Artmann, Hans, Schmollngruber, Peter, Weber, Heribert, Friedrich, Thomas
Year of Publication 24.03.2022

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Patent

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT

by Mach, Sophielouise, Scheurle, Andreas, Fritz, Joachim, Schmollngruber, Peter, Weber, Heribert, Friedrich, Thomas
Year of Publication 17.03.2022

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Patent

Verfahren zur Herstellung einer mikromechanischen Struktur

Verfahren zur Herstellung einer mikromechanischen Struktur

by Reinmuth, Jochen, Weber, Heribert
Year of Publication 19.03.2020

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Patent

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

by SCHMOLLNGRUBER, Peter, MACH, Sophielouise, WEBER, Heribert
Year of Publication 04.05.2023

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Patent

Mikromechanisches Bauteil für eine Sensor- oder Mikrofonvorrichtung

Mikromechanisches Bauteil für eine Sensor- oder Mikrofonvorrichtung

by Mach, Sophielouise, Schmollngruber, Peter, Weber, Heribert
Year of Publication 27.04.2023

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Patent

MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE

MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE

by Senz, Volkmar, Hermes, Christoph, Artmann, Hans, Schmollngruber, Peter, Friedrich, Thomas, Weber, Heribert
Year of Publication 06.01.2022

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Patent

METHOD FOR SEALING ENTRIES IN A MEMS ELEMENT

METHOD FOR SEALING ENTRIES IN A MEMS ELEMENT

by Hermes, Christoph, Artmann, Hans, Schmollngruber, Peter, Menold, Tobias Joachim, Ametowobla, Mawuli, Weber, Heribert, Friedrich, Thomas
Year of Publication 06.01.2022

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Patent

MICROMECHANICAL PRESSURE SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD

MICROMECHANICAL PRESSURE SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD

by SCHMOLLNGRUBER, Peter, WEBER, Heribert
Year of Publication 16.01.2020

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Patent

Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren

Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren

by Schmollngruber, Peter, Weber, Heribert
Year of Publication 16.01.2020

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Patent

MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT

MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT

by Reinmuth, Jochen, Artmann, Hans, Hermes, Christoph, Schmollngruber, Peter, Weber, Heribert, Friedrich, Thomas
Year of Publication 23.12.2021

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Patent

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