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Year of Publication 26.04.2022
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Year of Publication 24.03.2020
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Rotary disc with electrostatic clamping table for ion implantation
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Transfer chamber and method of using a transfer chamber
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Year of Publication 15.10.2019
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Buffer Chamber Wafer Heating Mechanism And Supporting Robots
Vopat, Robert Brent, Riordon, Benjamin B, Pergande, Paul E, Schaller, Jason M, Blahnik, David, Weaver, William T
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Year of Publication 03.09.2020
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Year of Publication 16.05.2024
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Buffer chamber wafer heating mechanism and supporting robots
Vopat, Robert Brent, Riordon, Benjamin B, Pergande, Paul E, Schaller, Jason M, Blahnik, David, Weaver, William T
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Year of Publication 30.06.2020
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Dynamic leveling process heater lift
NGUYEN TUAN ANH, WEAVER WILLIAM T, SCHALLER JASON M, ROHRER MICHAEL, FREEMAN, GORDON, VOPAT ROBERT BRENT
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Year of Publication 27.02.2024
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TRANSPORT SYSTEM
OLDENDORF, Ulrich, BERGER, Alex, ASSAF, Shay, CONSTANT, Andrew J, NEWMAN, Jacob, AENIS, Martin, WEAVER, William T, HUDGENS, Jeffrey C
Year of Publication 09.04.2020
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Year of Publication 09.04.2020
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Spinning disk for processing workpieces and ion implantation system including thereof
SINCLAIR, FRANK, MITCHELL, ROBERT, PARISI, NICK, WEAVER, WILLIAM T, OLSON, JOSEPH C
Year of Publication 01.10.2023
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Year of Publication 01.10.2023
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Substrate handling and heating system
Vopat, Robert Brent, Lischer, D. Jeffrey, Evans, Morgan D, Moradian, Ala, Schaller, Jason M, Weaver, William T
Year of Publication 15.10.2019
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Year of Publication 15.10.2019
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Batch Heating and Cooling Chamber or Loadlock
Vopat, Robert Brent, Pergande, Paul E, Riordon, Benjamin B, Schaller, Jason M, Blahnik, David, Weaver, William T
Year of Publication 22.08.2019
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Year of Publication 22.08.2019
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