Visualization of Acoustic Waves and Cavitation in Ultrasonic Water Flow
Watanabe, Katsuhide, Matsuo, Hisanori, Ishibashi, Tomoatsu, Ando, Keita, Usui, Hidehisa
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
The endpoint detection method using moiré pattern in CMP’s EPD system
Takitani, Sho, Yamamoto, Soma, Matsuo, Hisanori, Watanabe, Katsuhide, Suzuki, Keisuke
Published in Japanese Journal of Applied Physics (01.07.2023)
Published in Japanese Journal of Applied Physics (01.07.2023)
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Journal Article
Optimal Injection Distance in Ultrasonic Water Flow Cleaning
Sakota, Riria, Watanabe, Katsuhide, Matsuo, Hisanori, Ando, Keita, Ishibashi, Tomoatsu, Usui, Hidehisa
Published in Solid state phenomena (14.08.2023)
Published in Solid state phenomena (14.08.2023)
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Journal Article
Parametric Studies on Particle Removal and Erosion in Nozzle Injection Megasonic Cleaning
Watanabe, Katsuhide, Sakota, Riria, Matsuo, Hisanori, Ishibashi, Tomoatsu, Ando, Keita, Usui, Hidehisa
Published in Solid state phenomena (14.08.2023)
Published in Solid state phenomena (14.08.2023)
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Journal Article
Planarization profile modeling using pad bulk deformation and real contact area analysis of macro-scale device pattern
Jeong, Seonho, Jeong, Jongmin, Shin, Yeongil, Park, Youngwook, Kabasawa, Masashi, Hiyama, Hirokuni, Watanabe, Katsuhide, Matsuo, Hisanori, Wada, Yutaka, Jeong, Haedo
Published in Japanese Journal of Applied Physics (01.07.2023)
Published in Japanese Journal of Applied Physics (01.07.2023)
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Journal Article
Design of a blind spatial and temporal RBF equalizer using a genetic algorithm
Watanabe, Katsuhide, Lin, Hai, Yamashita, Katsumi
Published in Electrical engineering in Japan (01.09.2005)
Published in Electrical engineering in Japan (01.09.2005)
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Journal Article
기판 처리 장치 및 정보 처리 시스템
TAKAHASHI HIROKI, KAGOSHIMA TAKAHITO, SUZUKI YUTA, WATANABE KATSUHIDE, MATSUO HISANORI, NAKAMURA AKIRA
Year of Publication 16.02.2024
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Year of Publication 16.02.2024
Patent
SUBSTRATE PROCESSING DEVICE AND INFORMATION PROCESSING SYSTEM
NAKAMURA Akira, SUZUKI Yuta, WATANABE Katsuhide, MATSUO Hisanori, TAKAHASHI Hiroki, KAGOSHIMA Takahito
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
Patent
Physical Simulation and Visualization of the Marangoni Convection inside Meniscus Region under IPA Vapor in Wafer Drying Process
Ono, Naoki, Yamada, Takashi, Miura, Shumpei, Ishibashi, Tomoatsu, Matsuo, Hisanori, Watanabe, Katsuhide
Published in ECS transactions (03.07.2019)
Published in ECS transactions (03.07.2019)
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Journal Article