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Apparatus for inducing eddy current in a semiconductor wafer for measuring the electric conductivity or resistivity thereof
by
WATAMURA
;
KOICHI
,
AOKI; HIDEO
,
WATANABE; TAKASHI
,
KAWATANI; KAZUYA
Year of Publication
17.06.1975
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Patent
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chemistry
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medicine
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physics
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sciences
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investigating or analysing materials by determining theirchemical or physical properties
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measuring
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measuring electric variables
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measuring magnetic variables
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physics
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testing
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English
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esp@cenet
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