Photochemical Studies on Bottom Anti-Reflective Coatings
Guerrero, Douglas J., Mercado, Ramil, Washburn, Carlton, Meador, Jim
Published in Journal of Photopolymer Science and Technology (01.01.2006)
Published in Journal of Photopolymer Science and Technology (01.01.2006)
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Journal Article
Chemical Failure Mode Addition to the Failure Mode Taxonomy
WASHBURN, Carlton, GRANTHAM, Katie
Published in Journal of failure analysis and prevention (01.12.2012)
Published in Journal of failure analysis and prevention (01.12.2012)
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Journal Article
Throughput Increases Using EUV Assist Layers
Washburn, Carlton, Ouattara, Tantiboro, Collin, Aline, Krishnamurthy, Vandana, Guerrero, Douglas
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article
ASSIST LAYERS FOR EUV LITHOGRAPHY
OUATTARA TANTIBORO, GUERRERO DOUGLAS, WASHBURN CARLTON, KRISHNAMURTHY VANDANA, COLLIN ALINE
Year of Publication 21.08.2014
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Year of Publication 21.08.2014
Patent
PROCESSES TO PATTERN SMALL FEATURES FOR ADVANCED PATTERNING NEEDS
SCOTT CLAUDIA, WASHBURN CARLTON ASHLEY, LAMB JAMES E. III, LIN QIN, KRISHNAMURTHY VANDANA, BRAKENSIEK NICKOLAS L, WANG YUBAO
Year of Publication 07.01.2014
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Year of Publication 07.01.2014
Patent
STRUCTURE COMPRISING ASSIST LAYERS FOR EUV LITHOGRAPHY AND METHOD FOR FORMING IT
COLLIN, Aline, WASHBURN, Carlton, KRISHNAMURTHY, Vandana, OUATTARA, Tantiboro, GUERRERO, Douglas
Year of Publication 10.03.2021
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Year of Publication 10.03.2021
Patent
ASSIST LAYERS FOR EUV LITHOGRAPHY
OUATTARA, TANTIBORO, GUERRERO, DOUGLAS, WASHBURN, CARLTON, KRISHNAMURTHY, VANDANA, COLLIN, ALINE
Year of Publication 01.07.2015
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Year of Publication 01.07.2015
Patent
Processes to pattern small features for advanced patterning needs
Scott, Claudia, Washburn, Carlton Ashley, Brakensiek, Nickolas L, Lin, Qin, Krishnamurthy, Vandana, Lamb, III, James E, Wang, Yubao
Year of Publication 01.05.2018
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Year of Publication 01.05.2018
Patent
Assist layers for EUV lithography
OUATTARA TANTIBORO, GUERRERO DOUGLAS, WASHBURN CARLTON, KRISHNAMURTHY VANDANA, COLLIN ALINE
Year of Publication 03.03.2015
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Year of Publication 03.03.2015
Patent
ASSIST LAYERS FOR EUV LITHOGRAPHY
OUATTARA, TANTIBORO, GUERRERO, DOUGLAS, WASHBURN, CARLTON, KRISHNAMURTHY, VANDANA, COLLIN, ALINE
Year of Publication 01.10.2014
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Year of Publication 01.10.2014
Patent
ASSIST LAYERS FOR EUV LITHOGRAPHY
OUATTARA, TANTIBORO, GUERRERO, DOUGLAS, WASHBURN, CARLTON, KRISHNAMURTHY, VANDANA
Year of Publication 30.05.2013
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Year of Publication 30.05.2013
Patent
ASSIST LAYERS FOR EUV LITHOGRAPHY
OUATTARA TANTIBORO, GUERRERO DOUGLAS, WASHBURN CARLTON A, KRISHNAMURTHY VANDANA
Year of Publication 23.05.2013
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Year of Publication 23.05.2013
Patent
Methods of producing structures using a developer-soluble layer with multilayer technology
WASHBURN CARLTON ASHLEY, FURSE JUSTIN LEE, LAMB, III JAMES E, SMITH BRIAN A, WANG HEPING
Year of Publication 04.11.2014
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Year of Publication 04.11.2014
Patent
Assist layers for euv lithography
OUATTARA, TANTIBORO, GUERRERO, DOUGLAS, WASHBURN, CARLTON, KRISHNAMURTHY, VANDANA, COLLIN ALINE
Year of Publication 11.05.2017
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Year of Publication 11.05.2017
Patent