CAPACITOR MANUFACTURING METHOD OF CAPACITOR AND SEMICONDUCTOR EQUIPMENT
XIA WEI, JIANG BINGXUAN, ZHENG JINGUO, XIE QIAN, YANG YUJIE, WANG KUANMAO, YANG JINGSHAN, DING PEIJUN
Year of Publication 24.10.2023
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Year of Publication 24.10.2023
Patent
커패시터, 커패시터 제조 방법 및 반도체 장치
XIA WEI, JIANG BINGXUAN, ZHENG JINGUO, XIE QIAN, YANG YUJIE, WANG KUANMAO, YANG JINGSHAN, DING PEIJUN
Year of Publication 03.08.2020
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Year of Publication 03.08.2020
Patent
Challenges and recent advances in HfO2-based ferroelectric films for non-volatile memory applications
Shao, Ming-Hao, Zhao, Rui-Ting, Liu, Houfang, Xu, Wen-Jia, Guo, Yi-Da, Huang, Da-Peng, Yang, Yu-Zhe, Li, Xin-Ru, Shao, Wancheng, Shen, Peng-Hui, Liu, Junwei, Wang, Kuanmao, Zheng, Jinguo, Yan, Zhao-Yi, Yan, Jian-Lan, Lu, Tian, Yang, Yi, Ren, Tian-Ling
Published in Chip (Hong Kong) (01.06.2024)
Published in Chip (Hong Kong) (01.06.2024)
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Journal Article
PVD systems for advanced packaging applications
Zhen, Jinguo, Wang, Kuanmao, Xia, Wei, Wang, Hougong, Ding, Peijun
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding
CAPACITOR, MANUFACTURING METHOD OF CAPACITOR, AND SEMICONDUCTOR EQUIPMENT
YANG, Yujie, YANG, Jingshan, XIA, Wei, WANG, Kuanmao, XIE, Qian, ZHENG, Jinguo, DING, Peijun, JIANG, Bingxuan
Year of Publication 28.08.2020
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Year of Publication 28.08.2020
Patent