TOROIDAL PLASMA SOURCE FOR PLASMA PROCESSING
LOEWENHARDT PETER, LANE CHRISTOPER T, COX MICHAEL S, WANAMAKER DAVID P, PARKS JOHN, LAI CANFENG, MAJEWSKI ROBERT B, SHAMOUILIAN SHAMOUIL
Year of Publication 15.01.2002
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Year of Publication 15.01.2002
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Toroidal plasma source for plasma processing
LOEWENHARDT, PETER, SHAMOUILIAN, SAM, COX, MICHAEL S, WANAMAKER, DAVID P, PARKS, JOHN, MAJEWSKI, ROBERT B, LANE, CHRISTOPER T, LAI, CANFENG
Year of Publication 05.01.2005
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Year of Publication 05.01.2005
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Toroidal plasma source for plasma processing
LOEWENHARDT PETER, COX MICHAEL S, PARKS JOHN P, WANAMAKER DAVID P, LANE CHRISTOPHER T, LAI CANFENG, MAJEWSKI ROBERT B, SHAMOUILIAN SHAMOUIL
Year of Publication 30.03.2004
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Year of Publication 30.03.2004
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Toroidal plasma source for plasma processing
Cox, Michael S, Lai, Canfeng, Majewski, Robert B, Wanamaker, David P, Lane, Christopher T, Loewenhardt, Peter, Shamouilian, Shamouil, Parks, John P
Year of Publication 30.03.2004
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Year of Publication 30.03.2004
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Toroidal plasma source for plasma processing
LOEWENHARDT, PETER, SHAMOUILIAN, SAM, COX, MICHAEL S, WANAMAKER, DAVID P, PARKS, JOHN, MAJEWSKI, ROBERT B, LANE, CHRISTOPER T, LAI, CANFENG
Year of Publication 28.11.2001
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Year of Publication 28.11.2001
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Toroidal plasma source for plasma processing
LOEWENHARDT PETER, COX MICHAEL S, PARKS JOHN P, WANAMAKER DAVID P, LANE CHRISTOPHER T, LAI CANFENG, MAJEWSKI ROBERT B, SHAMOUILIAN SHAMOUIL
Year of Publication 31.10.2002
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Year of Publication 31.10.2002
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Toroidal plasma source for plasma processing
Cox, Michael S, Lai, Canfeng, Majewski, Robert B, Wanamaker, David P, Lane, Christopher T, Loewenhardt, Peter, Shamouilian, Shamouil, Parks, John P
Year of Publication 16.07.2002
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Year of Publication 16.07.2002
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Toroidal plasma source for plasma processing
LOEWENHARDT PETER, COX MICHAEL S, PARKS JOHN P, WANAMAKER DAVID P, LANE CHRISTOPHER T, LAI CANFENG, MAJEWSKI ROBERT B, SHAMOUILIAN SHAMOUIL
Year of Publication 16.07.2002
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Year of Publication 16.07.2002
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TOROIDAL PLASMA SOURCE FOR PLASMA PROCESSING
COX MICHAEL S, WANAMAKER DAVID P, LANE CHRISTOPHER T, PARKS JOHN, LAI CANFENG, LOEWENHARDT PETER K, MAJEWSKI ROBERT B, SHAMOUILIAN SHAMOUIL
Year of Publication 05.07.2002
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Year of Publication 05.07.2002
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