High‐Rate Growth of Single‐Crystalline Diamond (100) Films by Hot‐Filament Chemical Vapor Deposition with Tantalum Filaments at 3000 °C
Tabakoya, Taira, Kanada, Shohei, Wakui, Yusuke, Takamori, Yue, Yamada, Tatsuki, Nagai, Masatsugu, Kojima, Yoshiyasu, Ariyada, Osamu, Yamasaki, Satoshi, Nebel, Christoph E., Matsumoto, Tsubasa, Inokuma, Takao, Tokuda, Norio
Published in Physica status solidi. A, Applications and materials science (01.11.2019)
Published in Physica status solidi. A, Applications and materials science (01.11.2019)
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Journal Article
High‐Rate Growth of Single‐Crystalline Diamond (100) Films by Hot‐Filament Chemical Vapor Deposition with Tantalum Filaments at 3000 °C
Tabakoya, Taira, Kanada, Shohei, Wakui, Yusuke, Takamori, Yue, Yamada, Tatsuki, Nagai, Masatsugu, Kojima, Yoshiyasu, Ariyada, Osamu, Yamasaki, Satoshi, Nebel, Christoph E., Matsumoto, Tsubasa, Inokuma, Takao, Tokuda, Norio
Published in Physica status solidi. A, Applications and materials science (01.11.2019)
Published in Physica status solidi. A, Applications and materials science (01.11.2019)
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Journal Article
HOT FILAMENT CVD DEVICE
TOKUDA NORIO, KANODA SHOHEI, MATSUMOTO TASUKU, KOJIMA YOSHIYASU, ARIYADA OSAMU, IGUMA TAKAO, WAKUI YUSUKE
Year of Publication 20.06.2019
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Year of Publication 20.06.2019
Patent