Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
Mills, Lynne K, Waeterloos, Joost J. M, Wilson, Larry R, Shaffer, Edward O. II, Townsend, Paul H. III, Gombar-Fetner, Sheila, Hetzner, Jack E, Howard, Kevin E
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, STRITTMATTER, RICHARD, J, WAETERLOOS, JOOST, J., M
Year of Publication 23.01.2013
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Year of Publication 23.01.2013
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An article having multilayer dielectric stack
LYNNE K. MILLS, PAUL H- TOWNSEND, JOOST J. M. WAETERLOOS, RICHARD J. STRITTMATTER
Year of Publication 21.12.2010
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Year of Publication 21.12.2010
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Tri-layer masking architecture for patterning dual damascene interconnects
WAETERLOOS JOOST J. M, TOWNSEND PAUL H. III, MILLS LYNNE K, STRITTMATTER RICHARD J
Year of Publication 27.07.2005
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Year of Publication 27.07.2005
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TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, STRITTMATTER, RICHARD, J, WAETERLOOS, JOOST, J., M
Year of Publication 05.01.2005
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Year of Publication 05.01.2005
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Tri-layer masking architecture for patterning dual damascene interconnects
Townsend, III, Paul H, Mills, Lynne K, Waeterloos, Joost J. M, Strittmatter, Richard J
Year of Publication 09.11.2004
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Year of Publication 09.11.2004
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Tri-layer masking architecture for patterning dual damascene interconnects
WAETERLOOS JOOST J. M, TOWNSEND, III PAUL H, MILLS LYNNE K, STRITTMATTER RICHARD J
Year of Publication 09.11.2004
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Year of Publication 09.11.2004
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TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, STRITTMATTER, RICHARD, J, WAETERLOOS, JOOST, J., M
Year of Publication 04.11.2004
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Year of Publication 04.11.2004
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Tri-layer masking architecture for patterning dual damascene interconnects
WAETERLOOS JOOST J. M, TOWNSEND PAUL H, MILLS LYNNE K, STRITTMATTER RICHARD J
Year of Publication 27.11.2003
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Year of Publication 27.11.2003
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TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
PAUL, H., III TOWNSEND, LYNNE, K. MILLS, JOOST, J., M. WAETERLOOS, RICHARD, J. STRITTMATTER
Year of Publication 20.10.2003
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Year of Publication 20.10.2003
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TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, STRITTMATTER, RICHARD, J, WAETERLOOS, JOOST, J., M
Year of Publication 16.10.2003
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Year of Publication 16.10.2003
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Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA
Year of Publication 02.04.2008
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Year of Publication 02.04.2008
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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
WAETERLOOS JOOST J. M, TOWNSEND PAUL H, WILSON LARRY R.?, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, SHAFFER EDWARD O, HOWARD KEVIN E
Year of Publication 07.08.2013
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Year of Publication 07.08.2013
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Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
HETZNER, JACK E, TOWNSEND, PAUL H. III, WAETERLOOS, JOOST J. M, SHAFFER, EDWARD O. II, MILLS, LYNNE K, HOWARD, KEVIN E, WILSON, LARRY R, GOMBAR-FETNER, SHEILA
Year of Publication 26.09.2007
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Year of Publication 26.09.2007
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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
WAETERLOOS JOOST J. M, SHAFFER, II EDWARD O, TOWNSEND, III PAUL H, WILSON LARRY R, MILLS LYNNE K, GOMBAR-FETNER SHEILA, HETZNER JACK E, HOWARD KEVIN E
Year of Publication 03.10.2006
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Year of Publication 03.10.2006
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Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
Shaffer, II, Edward O, Howard, Kevin E, Waeterloos, Joost J. M, Hetzner, Jack E, Townsend, III, Paul H, Mills, Lynne K, Gombar-Fetner, Sheila, Wilson, Larry R
Year of Publication 03.10.2006
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Year of Publication 03.10.2006
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ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN THE FABRICATION OF MICROELECTRONIC DEVICES
HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M
Year of Publication 28.05.2003
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Year of Publication 28.05.2003
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ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES
HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M
Year of Publication 27.12.2002
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Year of Publication 27.12.2002
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ORGANOSILICATE RESINS AS HARDMASKS FOR ORGANIC POLYMER DIELECTRICS IN FABRICATION OF MICROELECTRONIC DEVICES
HETZNER, JACK, E, TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, GOMBAR-FETNER, SHEILA, SHAFFER, EDWARD, O., II, WILSON, LARRY, R, HOWARD, KEVIN, E, WAETERLOOS, JOOST, J., M
Year of Publication 28.02.2002
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Year of Publication 28.02.2002
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