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Year of Publication 15.12.2016
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Year of Publication 15.12.2016
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Year of Publication 17.11.2014
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Year of Publication 13.04.2015
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Year of Publication 13.04.2015
Patent
Low Dielectric Loss Tangent, Highly Scandium Doped Aluminum Nitride Thin Film for Acoustic Devices
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Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
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High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure
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Published in 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2020)
Published in 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) (01.03.2020)
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Conference Proceeding