Search Results - "WACK DANIEL" :: K.UTB vyhledávací portál

Loading…

EUV LIGHT SOURCE USING CRYOGENIC DROPLET TARGETS IN MASK INSPECTION

by KHODYKIN, Oleg, BYKANOV, Alexander, WACK, Daniel, Christopher
Year of Publication 25.12.2019

Get full text

Patent

Loading…

Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation

by DELGADO GILDARDO, WACK DANIEL
Year of Publication 10.05.2016

Get full text

Patent

Loading…

FAST PHASE-SHIFT INTERFEROMETRY BY LASER FREQUENCY SHIFT

by SHI, Rui-Fang, WACK, Daniel C, HUANG, Haifeng
Year of Publication 27.05.2021

Get full text

Patent

Loading…

FAST PHASE-SHIFT INTERFEROMETRY BY LASER FREQUENCY SHIFT

by Huang, Haifeng, Wack, Daniel C, Shi, Rui-Fang
Year of Publication 27.05.2021

Get full text

Patent

Loading…

COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT MEASUREMENT

by SHI, Rui-Fang, WACK, Daniel, HUANG, Haifeng, KESTNER, Robert
Year of Publication 06.05.2021

Get full text

Patent

Loading…

LASER-PRODUCED PLASMA EUV SOURCE WITH REDUCED DEBRIS GENERATION

by DELGADO, GILDARDO, WACK, DANIEL
Year of Publication 03.06.2015

Get full text

Patent

Loading…

$Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction$

Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction

by Kuznetsov, Alexander, Artemiev, Nikolay, Wack, Daniel, Khodykin, Oleg, Shchegrov, Andrei V, Friedmann, Michael
Year of Publication 17.05.2022

Get full text

Patent

Loading…

LASER-PRODUCED PLASMA EUV SOURCE WITH REDUCED DEBRIS GENERATION

by DELGADO, GILDARDO, WACK, DANIEL
Year of Publication 16.07.2014

Get full text

Patent

Loading…

INSPECTION SYSTEM WITH NON-CIRCULAR PUPIL

by SHI, Rui-Fang, JO, Sseunhyeun Joshua, WACK, Daniel, KVAMME, Damon, YE, Xin Roli
Year of Publication 07.09.2022

Get full text

Patent

Loading…

Inspection system with non-circular pupil

by Ye, Xin, Kvamme, Damon F, Shi, Rui-fang, Jo, Sseunhyeun, Wack, Daniel C
Year of Publication 07.09.2021

Get full text

Patent

Loading…

OPTICAL CHARACTERIZATION SYSTEMS EMPLOYING COMPACT SYNCHROTRON RADIATION SOURCES

by LIU, YANWEI, WACK, DANIEL
Year of Publication 20.02.2014

Get full text

Patent

Loading…

APPARATUS AND METHOD FOR SYNCHRONIZING SAMPLE STAGE MOTION WITH A TIME DELAY INTEGRATION CHARGE-COUPLE DEVICE IN A SEMICONDUCTOR INSPECTION TOOL

by ALLES, David, WRIGHT, Michael, WACK, Daniel, SUBRAHMANYAN, Pradeep
Year of Publication 14.08.2019

Get full text

Patent

Loading…

Acousto-optic modulator laser frequency shifter system, method for fast phase-shift interferometry, and characterization system

by HUANG, HAIFENG, SHI, RUI-FANG, WACK, DANIEL C
Year of Publication 01.05.2024

Get full text

Patent

Loading…

INSPECTION SYSTEM WITH NON-CIRCULAR PUPIL

by SHI, Rui-Fang, JO, Sseunhyeun Joshua, WACK, Daniel, KVAMME, Damon, YE, Xin Roli
Year of Publication 13.10.2021

Get full text

Patent

Loading…

LASER-PRODUCED PLASMA EUV SOURCE WITH REDUCED DEBRIS GENERATION

by DELGADO, GILDARDO, WACK, DANIEL
Year of Publication 14.03.2013

Get full text

Patent

Loading…

LASER-PRODUCED PLASMA EUV SOURCE WITH REDUCED DEBRIS GENERATION

by DELGADO GILDARDO, WACK DANIEL
Year of Publication 14.03.2013

Get full text

Patent

Loading…

EUV LIGHT SOURCE USING CRYOGENIC DROPLET TARGETS IN MASK INSPECTION

by KHODYKIN, Oleg, BYKANOV, Alexander, WACK, Daniel, Christopher
Year of Publication 25.01.2017

Get full text

Patent

Loading…

Optical characterization systems employing compact synchrotron radiation sources

by LIU YANWEI, WACK DANIEL C
Year of Publication 27.01.2015

Get full text

Patent

Loading…

Inspection System with Non-Circular Pupil

by Ye, Xin, Kvamme, Damon F, Shi, Rui-fang, Jo, Sseunhyeun, Wack, Daniel C
Year of Publication 16.07.2020

Get full text

Patent

Loading…

Optical characterization systems employing compact synchrotron radiation sources

by LIU YANWEI, WACK DANIEL C
Year of Publication 10.06.2014

Get full text

Patent

Refine Results

Format

Subject Area

Topic

Language

Year of Publication

Database