UHV/CVD i-Si epitaxy and ion implantation doping for sub-micrometer N−Collector of SiGeHBT
W. Zhang, H.W. Lin, L. Yue, C.C. Chen, Z.H. Liu, Y.S. Lu, W.Z. Dou, P.H. Tsien
Published in Journal of Ceramic Processing Research, 7(4) (01.12.2006)
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Published in Journal of Ceramic Processing Research, 7(4) (01.12.2006)
Journal Article