An advanced MEMS sensor packaging concept for use in harsh environments
von Berg, Jochen, Cavalloni, Claudio, Mukhopadhyay, Biswajit, Mackowiak, Piotr, Ehrmann, Oswin, Lang, Klaus-Dieter, Ha-Duong Ngo
Published in 2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013) (01.12.2013)
Published in 2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013) (01.12.2013)
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Conference Proceeding
Pressure sensor having a piezoresistive sensor chip element
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Year of Publication 11.02.2015
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Year of Publication 11.02.2015
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PRESSURE SENSOR HAVING A PIEZORESISTIVE SENSOR CHIP ELEMENT
SONDEREGGER, CHRISTOF, ALBICKER, ULRICH, VON BERG, JOCHEN, TANNER, RENÉ, SCHNELLINGER, JEFFREY, M, MEISTER, PETER
Year of Publication 14.01.2015
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Year of Publication 14.01.2015
Patent
Pressure sensor having a piezoresistive sensor chip element
SONDEREGGER CHRISTOF, VON BERG JOCHEN, TANNER RENE, ALBICKER ULRICH, MEISTER PETER, SCHNELLINGER JEFFREY M
Year of Publication 29.10.2013
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Year of Publication 29.10.2013
Patent
PRESSURE SENSOR HAVING A PIEZORESISTIVE SENSOR CHIP ELEMENT
SONDEREGGER, CHRISTOF, ALBICKER, ULRICH, VON BERG, JOCHEN, TANNER, RENE, SCHNELLINGER, JEFFREY, M, MEISTER, PETER
Year of Publication 10.07.2013
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Year of Publication 10.07.2013
Patent
PRESSURE SENSOR HAVING A PIEZORESISTIVE SENSOR CHIP ELEMENT
SONDEREGGER CHRISTOF, VON BERG JOCHEN, TANNER RENE, ALBICKER ULRICH, MEISTER PETER, SCHNELLINGER JEFFREY M
Year of Publication 04.07.2013
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Year of Publication 04.07.2013
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Sensor unit for the measurment of a variable in a medium
Obermeier, Ernst, Mukhopadhyay, Biswajit, Von Berg, Jochen, Albicker, Ulrich, Gnielka, Marco, Cavalloni, Claudio
Year of Publication 21.06.2011
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Year of Publication 21.06.2011
Patent
Sensor unit for the measurment of a variable in a medium
MUKHOPADHYAY BISWAJIT, CAVALLONI CLAUDIO, OBERMEIER ERNST, VON BERG JOCHEN, ALBICKER ULRICH, GNIELKA MARCO
Year of Publication 21.06.2011
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Year of Publication 21.06.2011
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SENSOREINHEIT
SONDEREGGER, CHRISTOF, VON BERG, JOCHEN, TANNER, RENE, GNIELKA, MARCO, CAVALLONI, CLAUDIO
Year of Publication 15.11.2010
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Year of Publication 15.11.2010
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SENSOR UNIT
SONDEREGGER, CHRISTOF, VON BERG, JOCHEN, TANNER, RENE, GNIELKA, MARCO, CAVALLONI, CLAUDIO
Year of Publication 20.10.2010
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Year of Publication 20.10.2010
Patent
Sensor Unit
SONDEREGGER CHRISTOF, CAVALLONI CLAUDIO, VON BERG JOCHEN, TANNER RENE, GNIELKA MARCO
Year of Publication 29.06.2010
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Year of Publication 29.06.2010
Patent
Sensor Unit
Von Berg, Jochen, Sonderegger, Christof, Cavalloni, Claudio, Tanner, René, Gnielka, Marco
Year of Publication 29.06.2010
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Year of Publication 29.06.2010
Patent
SENSOR UNIT
MUKHOPADHYAY BISWAJIT, CAVALLONI CLAUDIO, OBERMEIER ERNST, VON BERG JOCHEN, ALBICKER ULRICH, GNIELKA MARCO
Year of Publication 28.01.2010
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Year of Publication 28.01.2010
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Sensor Unit
SONDEREGGER CHRISTOF, CAVALLONI CLAUDIO, VON BERG JOCHEN, TANNER RENE, GNIELKA MARCO
Year of Publication 30.10.2008
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Year of Publication 30.10.2008
Patent
SENSOR UNIT
SONDEREGGER, CHRISTOF, VON BERG, JOCHEN, TANNER, RENE, GNIELKA, MARCO, CAVALLONI, CLAUDIO
Year of Publication 02.04.2008
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Year of Publication 02.04.2008
Patent
Pressure sensor having a piezoresistive sensor chip element
SONDEREGGER CHRISTOF, VON BERG JOCHEN, TANNER RENE, ALBICKER ULRICH, MEISTER PETER, SCHNELLINGER JEFFREY M
Year of Publication 01.05.2013
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Year of Publication 01.05.2013
Patent
DRUCKSENSOR MIT PIEZORESISTIVEM SENSORCHIP-ELEMENT
JOCHEN VON BERG, PETER MEISTER, CHRISTOF SONDEREGGER, RENE TANNER, JEFFREY SCHNELLINGER, ULRICH ALBICKER
Year of Publication 15.03.2012
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Year of Publication 15.03.2012
Patent
PRESSURE SENSOR HAVING A PIEZORESISTIVE SENSOR CHIP ELEMENT
SONDEREGGER, CHRISTOF, ALBICKER, ULRICH, VON BERG, JOCHEN, TANNER, RENE, SCHNELLINGER, JEFFREY, M, MEISTER, PETER
Year of Publication 08.03.2012
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Year of Publication 08.03.2012
Patent
SENSOR UNIT
OBERMEIER, ERNST, ALBICKER, ULRICH, VON BERG, JOCHEN, GNIELKA, MARCO, MUKHOPADHYAY, BISWAJIT, CAVALLONI, CLAUDIO
Year of Publication 13.05.2009
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Year of Publication 13.05.2009
Patent
SENSOR UNIT
OBERMEIER, ERNST, ALBICKER, ULRICH, VON BERG, JOCHEN, GNIELKA, MARCO, MUKHOPADHYAY, BISWAJIT, CAVALLONI, CLAUDIO
Year of Publication 29.05.2008
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Year of Publication 29.05.2008
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