Strongly buckled square micromachined membranes
Ziebart, V., Paul, O., Baltes, H.
Published in Journal of microelectromechanical systems (01.12.1999)
Published in Journal of microelectromechanical systems (01.12.1999)
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Journal Article
Mechanical properties of thin films from the load deflection of long clamped plates
Ziebart, V., Paul, O., Munch, U., Schwizer, J., Baltes, H.
Published in Journal of microelectromechanical systems (01.09.1998)
Published in Journal of microelectromechanical systems (01.09.1998)
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Journal Article