Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Lederer, Maximilian, Kämpfe, Thomas, Vogel, Norman, Utess, Dirk, Volkmann, Beate, Ali, Tarek, Olivo, Ricardo, Müller, Johannes, Beyer, Sven, Trentzsch, Martin, Seidel, Konrad, Eng, And Lukas M
Published in Nanomaterials (Basel, Switzerland) (22.02.2020)
Published in Nanomaterials (Basel, Switzerland) (22.02.2020)
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Journal Article
In-situ study of the TDDB-induced damage mechanism in Cu/ultra-low-k interconnect structures
Liao, Zhongquan, Gall, Martin, Yeap, Kong Boon, Sander, Christoph, Mühle, Uwe, Gluch, Jürgen, Standke, Yvonne, Aubel, Oliver, Vogel, Norman, Hauschildt, Meike, Beyer, Armand, Engelmann, Hans-Jürgen, Zschech, Ehrenfried
Published in Microelectronic engineering (02.04.2015)
Published in Microelectronic engineering (02.04.2015)
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Journal Article
A New In Situ Microscopy Approach to Study the Degradation and Failure Mechanisms of Time-Dependent Dielectric Breakdown: Set-Up and Opportunities
Liao, Zhongquan, Gall, Martin, Yeap, Kong Boon, Sander, Christoph, Aubel, Oliver, Mühle, Uwe, Gluch, Jürgen, Niese, Sven, Standke, Yvonne, Rosenkranz, Rüdiger, Löffler, Markus, Vogel, Norman, Beyer, Armand, Engelmann, Hans-Jürgen, Guttmann, Peter, Schneider, Gerd, Zschech, Ehrenfried
Published in Advanced engineering materials (01.05.2014)
Published in Advanced engineering materials (01.05.2014)
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Journal Article
An experimental methodology for the in-situ observation of the time-dependent dielectric breakdown mechanism in Copper/low-k on-chip interconnect structures
Kong Boon Yeap, Gall, M., Sander, C., Niese, S., Zhongquan Liao, Ritz, Y., Rosenkranz, R., Muhle, U., Gluch, J., Zschech, E., Aubel, O., Beyer, A., Hennesthal, C., Hauschildt, M., Talut, G., Poppe, J., Vogel, N., Engelmann, H., Stauffer, D., Major, R., Warren, O.
Published in 2013 IEEE International Reliability Physics Symposium (IRPS) (01.04.2013)
Published in 2013 IEEE International Reliability Physics Symposium (IRPS) (01.04.2013)
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Conference Proceeding
MULTIPLEXED INTELLIGENCE COMMUNICATIONS
GRIFFITH, LEROY E, VOGEL, NORMAN A, DERVAN, JAMES T. (III), THORPE, ROBERT A, BLISS, BURTT E, PUNG, BRUCE D
Year of Publication 03.01.1978
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Year of Publication 03.01.1978
Patent