Metrology for the next generation of semiconductor devices
Orji, N G, Badaroglu, M, Barnes, B M, Beitia, C, Bunday, B D, Celano, U, Kline, R J, Neisser, M, Obeng, Y, Vladar, A E
Published in Nature electronics (2018)
Published in Nature electronics (2018)
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Journal Article
Research Update: Electron beam-based metrology after CMOS
Liddle, J. A., Hoskins, B. D., Vladár, A. E., Villarrubia, J. S.
Published in APL materials (01.07.2018)
Published in APL materials (01.07.2018)
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Journal Article
Modeling the Point-Spread Function in Helium-Ion Lithography
Winston, Donald, Ferrera, J., Battistella, L., Vladár, A. E., Berggren, K. K.
Published in Scanning (01.03.2012)
Published in Scanning (01.03.2012)
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Journal Article
Sample preparation protocols for realization of reproducible characterization of single-wall carbon nanotubes
Decker, J E, Hight Walker, A R, Bosnick, K, Clifford, C A, Dai, L, Fagan, J, Hooker, S, Jakubek, Z J, Kingston, C, Makar, J, Mansfield, E, Postek, M T, Simard, B, Sturgeon, R, Wise, S, Vladar, A E, Yang, L, Zeisler, R
Published in Metrologia (01.12.2009)
Published in Metrologia (01.12.2009)
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Journal Article
Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.
Published in Ultramicroscopy (01.07.2015)
Published in Ultramicroscopy (01.07.2015)
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Journal Article
Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library
Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.
Published in Ultramicroscopy (01.07.2015)
Published in Ultramicroscopy (01.07.2015)
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Journal Article
Scanning electron microscope dimensional metrology using a model-based library
Villarrubia, J. S., Vladár, A. E., Postek, M. T.
Published in Surface and interface analysis (01.11.2005)
Published in Surface and interface analysis (01.11.2005)
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Journal Article
Conference Proceeding
Widening the Window of Particle Beam Technology: Helium Ion Microscopy
Postek, M., Vladar, A.E., Ming, B., Purushotham, K.
Published in Microscopy and microanalysis (01.07.2012)
Published in Microscopy and microanalysis (01.07.2012)
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Journal Article
Focused Helium Ion Beam Nanomachining of Thin Membranes vs. Bulk Substrates
Mutunga, E.M., Lockerman, S., Tan, S., Livengood, R., Vladár, A.E., Klein, K.L.
Published in Microscopy and microanalysis (01.08.2014)
Published in Microscopy and microanalysis (01.08.2014)
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Journal Article
Image sharpness measurement in the scanning electron microscope-Part III
Zhang, Nien Fan, Postek, Michael T., Larrabee, Robert D., Vladár, András E., Keery, William J., Jones, Samuel N.
Published in Scanning (01.07.1999)
Published in Scanning (01.07.1999)
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Journal Article
Progression of Focused Helium Ion Beam Milling in Gold Substrates
Mutunga, E.M., Tan, S., Vladar, A.E., Klein, K.L.
Published in Microscopy and microanalysis (01.08.2015)
Published in Microscopy and microanalysis (01.08.2015)
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Journal Article
Helium Ion Nanomachining in Membranes and Bulk Substrates
Mutunga, E.M., Vladar, A.E., Stern, L.A., Klein, K.L.
Published in Microscopy and microanalysis (01.08.2013)
Published in Microscopy and microanalysis (01.08.2013)
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