Scanning electron microscope dimensional metrology using a model-based library
Villarrubia, J. S., Vladár, A. E., Postek, M. T.
Published in Surface and interface analysis (01.11.2005)
Published in Surface and interface analysis (01.11.2005)
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Journal Article
Conference Proceeding
Spectral density-based statistical measures for image sharpness
Zhang, Nien Fan, Vladar, Andras E, Postek, Michael T, Larrabee, Robert D
Published in Metrologia (01.10.2005)
Published in Metrologia (01.10.2005)
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Journal Article
Two-dimensional simulation and modeling in scanning electron microscope imaging and metrology research
Postek, Michael T., Vladár, András E., Lowney, Jeremiah R., Keery, William J.
Published in Scanning (01.07.2002)
Published in Scanning (01.07.2002)
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Journal Article
Image sharpness measurement in the scanning electron microscope-Part III
Zhang, Nien Fan, Postek, Michael T., Larrabee, Robert D., Vladár, András E., Keery, William J., Jones, Samuel N.
Published in Scanning (01.07.1999)
Published in Scanning (01.07.1999)
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Journal Article
Interalaboratory study on the lithographically produced scanning electron microscope magnification standard prototype
Postek, M.T., Vladar, A.E., Jones, S.N., Keery, W.J.
Published in Journal of research of the National Institute of Standards and Technology (01.07.1993)
Published in Journal of research of the National Institute of Standards and Technology (01.07.1993)
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Journal Article
X-Ray lithography mask metrology: use of transmitted electrons in an SEM for linewidth measurement
POSTEK, M. T, LOWNEY, J. R, VLADAR, A. E, KEERY, W. J, MARX, E, LARRABEE, R. D
Published in Journal of research of the National Institute of Standards and Technology (01.07.1993)
Published in Journal of research of the National Institute of Standards and Technology (01.07.1993)
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Journal Article