ToF-SIMS nitrogen profiles in oxynitride thin films: correlation with XPS bonding configurations
Ravizza, E., Spadoni, S., Grasso, S., Vitali, M. E., De Marco, C., Ghidini, G.
Published in Surface and interface analysis (01.01.2013)
Published in Surface and interface analysis (01.01.2013)
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Journal Article
Conference Proceeding
In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability
Langenbuch, M., Bottini, R., Vitali, M.E., Ghidini, G.
Published in Microelectronics and reliability (01.05.2005)
Published in Microelectronics and reliability (01.05.2005)
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Journal Article
Plasma damage reduction by using ISSG gate oxides
Cellere, G., Valentini, M.G., Caminati, M., Vitali, M.E., Moro, A., Paccagnella, A.
Published in 2003 8th International Symposium Plasma- and Process-Induced Damage (2003)
Published in 2003 8th International Symposium Plasma- and Process-Induced Damage (2003)
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Conference Proceeding