Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements
Sapeliauskas, E, Vanagas, G, Barauskas, D, Mikolajunas, M, Pakenas, E, Pelenis, D, Sergalis, G, Jukna, T, Virzonis, D
Published in Journal of micromechanics and microengineering (01.07.2015)
Published in Journal of micromechanics and microengineering (01.07.2015)
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Journal Article
A study of stacked PECVD silicon nitride films used for surface micromachined membranes
Mikolajūnas, M., Kaliasas, R., Andrulevičius, M., Grigaliūnas, V., Baltrušaitis, J., Viržonis, D.
Published in Thin solid films (01.10.2008)
Published in Thin solid films (01.10.2008)
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Journal Article
Plasma etching of virtually stress-free stacked silicon nitride films
Mikolajūnas, M., Baltrušaitis, J., Kopustinskas, V., Vanagas, G., Grigaliūnas, V., Viržonis, D.
Published in Thin solid films (03.08.2009)
Published in Thin solid films (03.08.2009)
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Journal Article
A thin chromium film formation monitoring method: Monitoring of the early stages
Jukna, T., Baltrušaitis, J., Sinkevičius, V., Viržonis, D.
Published in Thin solid films (31.03.2008)
Published in Thin solid films (31.03.2008)
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Journal Article
Capacitive micromachined ultrasound transducer (cMUT) for immunosensor design
Ramanaviciene, Almira, Virzonis, Darius, Vanagas, Gailius, Ramanavicius, Ar nas
Published in Analyst (London) (01.07.2010)
Published in Analyst (London) (01.07.2010)
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Journal Article
Thermal contact quality evaluation and real-time error correction during surface temperature measurements
Sinkevicius, V., Virzonis, D., Jukna, T.
Published in CIMSA. 2005 IEEE International Conference on Computational Intelligence for Measurement Systems and Applications, 2005 (2005)
Published in CIMSA. 2005 IEEE International Conference on Computational Intelligence for Measurement Systems and Applications, 2005 (2005)
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Conference Proceeding
Synthesis of sub-wavelength diffractive optical elements by 3D full-vectorial beam propagation method
Petruskevicius, R., Kezys, D., Mikolajunas, M., Grigaliunas, V., Baltrusaitis, J., Virzonis, D.
Published in 2009 11th International Conference on Transparent Optical Networks (01.06.2009)
Published in 2009 11th International Conference on Transparent Optical Networks (01.06.2009)
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Conference Proceeding