The Impact of Traces of Hydrogen Peroxide and Phosphate on the Ozone Decomposition Rate in "Pure Water"
Vandersmissen, K., De Smedt, F., Vinckier, C.
Published in Ozone: science & engineering (01.07.2008)
Published in Ozone: science & engineering (01.07.2008)
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Journal Article
A detailed study on the growth of thin oxide layers on silicon using ozonated solutions
DE SMEDT, F, VINCKIER, C, CORNELISSEN, I, DE GENDT, S, HEYNS, M
Published in Journal of the Electrochemical Society (01.03.2000)
Published in Journal of the Electrochemical Society (01.03.2000)
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Journal Article
Nucleation and growth behavior of atomic layer deposited HfO2 films on silicon oxide starting surfaces
Nyns, L, Hall, L, Conard, T, Delabie, A, Deweerd, W, Heyns, M, Van Elshocht, S, Van Hoornick, N, Vinckier, C, De Gendt, S
Published in Journal of the Electrochemical Society (01.01.2006)
Published in Journal of the Electrochemical Society (01.01.2006)
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Journal Article
Validation of vapor phase decomposition–droplet collection–total reflection X-ray fluorescence spectrometry for metallic contamination analysis of silicon wafers
Hellin, D., Rip, J., Arnauts, S., De Gendt, S., Mertens, P.W., Vinckier, C.
Published in Spectrochimica acta. Part B: Atomic spectroscopy (31.08.2004)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (31.08.2004)
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Journal Article
The Etching Mechanisms of SiO2 in Hydrofluoric Acid
Verhaverbeke, S., Teerlinck, I., Vinckier, C., Stevens, G., Cartuyvels, R., Heyns, M. M.
Published in Journal of the Electrochemical Society (01.10.1994)
Published in Journal of the Electrochemical Society (01.10.1994)
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Journal Article
The application of ozone in semiconductor cleaning processes : The solubility issue
DE SMEDT, F, DE GENDT, S, HEYNS, M. M, VINCKIER, C
Published in Journal of the Electrochemical Society (01.09.2001)
Published in Journal of the Electrochemical Society (01.09.2001)
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Journal Article
A new concept of carbon dioxide accelerated ammonia release from liquid manure in pig house
Ni, J.-Q., Hendriks, J., Vinckier, C., Coenegrachts, J.
Published in Environment international (01.08.2000)
Published in Environment international (01.08.2000)
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Journal Article
Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch-total reflection X-ray fluorescence spectrometry
Hellin, D, Bearda, T, Zhao, C, Raskin, G, Mertens, P.W, De Gendt, S, Heyns, M.M, Vinckier, C
Published in Spectrochimica acta. Part B: Atomic spectroscopy (15.12.2003)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (15.12.2003)
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Journal Article
Vapor phase decomposition–droplet collection–total reflection X-ray fluorescence spectrometry for metallic contamination analysis on Ge wafers
Hellin, D., Geens, V., Teerlinck, I., Van Steenbergen, J., Rip, J., Laureyn, W., Raskin, G., Mertens, P.W., De Gendt, S., Vinckier, C.
Published in Spectrochimica acta. Part B: Atomic spectroscopy (28.02.2005)
Published in Spectrochimica acta. Part B: Atomic spectroscopy (28.02.2005)
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Journal Article
Development and validation of a dynamic mathematical model of ammonia release in pig house
Ni, J.-Q., Hendriks, J., Vinckier, C., Coenegrachts, J.
Published in Environment international (01.08.2000)
Published in Environment international (01.08.2000)
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Journal Article
The Increasing Importance of the Use of Ozone in the Microelectronics Industry
De Smedt, F., De Gendt, S., Claes, M., Heyns, M.M., Vankerckhoven, H., Vinckier, C.
Published in Ozone: science & engineering (2002)
Published in Ozone: science & engineering (2002)
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Journal Article
Advanced Oxidation Processes in the Removal of Organics From Silicon Surfaces in IC Manufacturing: Theoretical Concepts
Smedt, F. De, Vankerckhoven, H., Vinckier, C.
Published in Ozone : science & engineering (01.10.2003)
Published in Ozone : science & engineering (01.10.2003)
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Journal Article
Conference Proceeding
Determination of the Pd content in Pd-doped SnO2 films
Laureyn, W, Delabie, L, Huyberechts, G, Maes, G, Roggen, J, Stevens, G, Vinckier, C
Published in Sensors and actuators. B, Chemical (30.06.2000)
Published in Sensors and actuators. B, Chemical (30.06.2000)
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Journal Article
Determination of Photoresist Degradation Products in O3/DI Processing
Vankerckhoven, H., De Smedt, F., Van Herp, B., Claes, M., De Gendt, S., Heyns, M.M., Vinckier, C.
Published in Ozone: science & engineering (01.01.2002)
Published in Ozone: science & engineering (01.01.2002)
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Journal Article