Transient behavior of three-fluid heat exchanger with three thermal communications under step change in inlet temperature of fluids using finite element method
Veerabhadrappa, Kavadiki, Vinayakaraddy, Gulabal, Seetharamu, K.N., Hegde, Pradeep G., Krishna, V.
Published in Applied thermal engineering (05.09.2016)
Published in Applied thermal engineering (05.09.2016)
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Journal Article
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING
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Year of Publication 23.04.2024
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SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT
LIND, Gary B, EIB, Andrew Paul, GULABAL, Vinayakaraddy, VELLANKI, Ravi
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Year of Publication 20.06.2024
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SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT
LIND, Gary B, EIB, Andrew Paul, GULABAL, Vinayakaraddy, VELLANKI, Ravi
Year of Publication 27.10.2022
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Year of Publication 27.10.2022
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CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIGH TEMPERATURE DEPOSITION SEQUENCE
LIND, Gary B, CLEVENGER, Jeff, GULABAL, Vinayakaraddy, VELLANKI, Ravi
Year of Publication 29.09.2022
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Year of Publication 29.09.2022
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IMPROVED PEDESTALS FOR SUBSTRATE PROCESSING SYSTEMS
RAO, Shreesha Yogish, BIRRU, Krishna, KHO, Leonard, KOTHAPALLI, Vijay, GULABAL, Vinayakaraddy, CHEN, Xitong
Year of Publication 11.01.2024
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Year of Publication 11.01.2024
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PROCESSING CHAMBER PURGE PLATE WITH SHROUD, AND PEDESTAL SHIELD SYSTEM
EIB, Andrew Paul, GULABAL, Vinayakaraddy, DHAWADE, Eashan Raju, VELLANKI, Ravi, NYGREN, Hans Peter
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
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EXCLUSION RING FOR SUBSTRATE PROCESSING
Chen, Erica Maxine, Gulabal, Vinayakaraddy, Vellanki, Ravi, Mahadeva, Alok, Ba, Xiaolan, Dhawade, Eashan Raju
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
Patent
Preventing deposition on pedestal in semiconductor substrate processing
Lind, Gary B, Rumer, Michael, Gulabal, Vinayakaraddy, Vellanki, Ravi, Satyadevan, Manjunath
Year of Publication 15.08.2023
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Year of Publication 15.08.2023
Patent
EXCLUSION RING FOR SUBSTRATE PROCESSING
CHEN, Erica Maxine, GULABAL, Vinayakaraddy, DHAWADE, Eashan Raju, MAHADEVA, Alok, VELLANKI, Ravi, BA, Xiaolan
Year of Publication 20.01.2022
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Year of Publication 20.01.2022
Patent
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING
LIND, Gary B, GULABAL, Vinayakaraddy, RUMER, Michael, VELLANKI, Ravi, SATYADEVAN, Manjunath
Year of Publication 29.07.2021
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Year of Publication 29.07.2021
Patent
PEDESTAL POLISHING APPARATUS
Manjunath, Mahendra Byrapura, Lind, Gary B, Kondi, Sushanth, Gulabal, Vinayakaraddy, Eib, Andrew Paul, Yalamarty, Vishnu Sai, McKinney, Robert, Ooi, Eddie Ze Thean
Year of Publication 19.01.2023
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Year of Publication 19.01.2023
Patent
METAL DEPOSITION
Chen, Yen-Chang, Butail, Gorun, Danek, Michal, van Cleemput, Patrick A, Lenz, Eric H, Tjokro, Novy, Gulabal, Vinayakaraddy, Gopinath, Sanjay, Thombare, Shruti Vivek, Vellanki, Ravi, Majumder, Prodyut
Year of Publication 15.09.2022
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Year of Publication 15.09.2022
Patent
Shadow ring alignment for substrate support
VELLANKI, RAVI, EIB, ANDREW PAUL, LIND, GARY B, GULABAL, VINAYAKARADDY
Year of Publication 16.04.2023
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Year of Publication 16.04.2023
Patent