Copper thin films deposited using different ion acceleration strategies in HiPIMS
Viloan, Rommel Paulo B., Helmersson, Ulf, Lundin, Daniel
Published in Surface & coatings technology (25.09.2021)
Published in Surface & coatings technology (25.09.2021)
Get full text
Journal Article
Bipolar HiPIMS for tailoring ion energies in thin film deposition
Keraudy, Julien, Viloan, Rommel Paulo B., Raadu, Michael A., Brenning, Nils, Lundin, Daniel, Helmersson, Ulf
Published in Surface & coatings technology (15.02.2019)
Published in Surface & coatings technology (15.02.2019)
Get full text
Journal Article
High Dynamic Range Imaging of Magnetized Sheet Plasma
Rosario, L. M. D., Ting, J. A. S., Viloan, R. P. B., Suarez, B. A. T., Villamayor, M. M. S., Tumlos, R. B., Soriano, M. N., Ramos, H. J.
Published in IEEE transactions on plasma science (01.11.2011)
Published in IEEE transactions on plasma science (01.11.2011)
Get full text
Journal Article
Bipolar high power impulse magnetron sputtering for energetic ion bombardment during TiN thin film growth without the use of a substrate bias
Viloan, Rommel Paulo B., Gu, Jiabin, Boyd, Robert, Keraudy, Julien, Li, Liuhe, Helmersson, Ulf
Published in Thin solid films (31.10.2019)
Published in Thin solid films (31.10.2019)
Get full text
Journal Article
Observation of Plasma-Facing-Wall via High Dynamic Range Imaging
VILLAMAYOR, Michelle Marie S., ROSARIO, Leo Mendel D., VILOAN, Rommel Paulo B., LACDAN, Ma. Camille C., TING, Julie Anne S., SUAREZ, Beverly Anne T., KATO, Shuichi, TUMLOS, Roy B., SORIANO, Maricor N., WADA, Motoi, RAMOS, Henry J.
Published in Plasma and Fusion Research (2013)
Published in Plasma and Fusion Research (2013)
Get full text
Journal Article
Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
Villamayor, Michelle Marie S., Keraudy, Julien, Shimizu, Tetsuhide, Viloan, Rommel Paulo B., Boyd, Robert, Lundin, Daniel, Greene, Joseph E., Petrov, Ivan, Helmersson, Ulf
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.11.2018)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.11.2018)
Get full text
Journal Article
Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
Villamayor, Michelle Marie S, Keraudy, Julien, Shimizu, Tetsuhide, Viloan, Rommel Paulo B, Boyd, Robert, Lundin, Daniel, Greene, J. E, Petrova, Ivan, Helmersson, Ulf
Year of Publication 31.08.2018
Year of Publication 31.08.2018
Get full text
Journal Article
Low temperature (Ts/Tm < 0.1) epitaxial growth of HfN/MgO(001) via reactive HiPIMS with metal-ion synchronized substrate bias
Villamayor, Michelle Marie S, Keraudy, Julien, Shimizu, Tetsuhide, Rommel Paulo B Viloan, Boyd, Robert, Lundin, Daniel, Greene, J E, Petrova, Ivan, Helmersson, Ulf
Published in arXiv.org (31.08.2018)
Get full text
Published in arXiv.org (31.08.2018)
Paper