Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitations
Pham, Nga P., O'Callaghan, John M., Prakasam, Vittal, Neutens, Pieter, Ceuppens, Joris, Viker, Jakob, Zhou, Di, Helin, Philippe
Published in 2024 International Conference on Optical MEMS and Nanophotonics (OMN) (28.07.2024)
Published in 2024 International Conference on Optical MEMS and Nanophotonics (OMN) (28.07.2024)
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