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Year of Publication 01.12.1999
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Year of Publication 26.02.2001
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Year of Publication 26.02.2001
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GAS BEARINGS FOR USE WITH VACUUM CHAMBERS AND THEIR APPLICATION IN LITHOGRAPHIC PROJECTION APPARATUS
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Year of Publication 26.02.2001
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Year of Publication 26.02.2001
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SCHLEIFMASCHINE
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Year of Publication 22.11.2007
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Year of Publication 22.11.2007
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Lithographic projection apparatus, vacuum apparatus, low-stiffness seal for sealing between vacuum chamber wall and elongate rod, device manufacturing method and integrated circuit manufactured thereof
BISSCHOPS, THEODORUS HUBERTUS JOSEPHUS, VIJFVINKEL, JAKOB, DRIESSEN, JOHANNES CORNELIS
Year of Publication 01.11.2003
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Year of Publication 01.11.2003
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Contamination barrier with expandable lamellas
FRERIKS JOHANNES M, SCHUURMANS FRANK J.P, MARIE DIERICHS MARCEL M.T, BOX WILHELMUS J, VIJFVINKEL JAKOB, BAKKER LEVINUS P
Year of Publication 27.09.2007
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Year of Publication 27.09.2007
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