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Passivation of Very Fast Near-Interface Traps at the 4H-SiC/SiO2 Interface Using Sodium Enhanced Oxidation
by
Sveinbjörnsson, E.Ö.
,
Haasmann, Daniel
,
Dimitrijev, Sima
,
Vidarsson
,
Arnar Mar
Published in
Materials science forum
(31.05.2023)
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engineering
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channel mobility
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dielectrics
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metal-oxide-semiconductor
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