Electrical and optical localisation of leakage current and breakdown point in SiOC:H low-k dielectrics
Vidal-Dho, Matthias, Hubert, Quentin, Gonon, Patrice, Pelissier, Bernard, Lentrein, Philippe, Ray, Patrice, Moragues, Jean-Michel, Fornara, Pascal
Published in 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) (01.05.2020)
Published in 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) (01.05.2020)
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Conference Proceeding
Probing impact on pad moisture tightness: A challenge for pad size reduction
Vidal-Dho, Matthias, Hubert, Quentin, Gonon, Patrice, Delorme, Philippe, Jacquot, Jonathan, Marchetti, Maxime, Beauvisage, Ludovic, Moragues, Jean-Michel, Potard, Pascale, Fornara, Pascal, Escales, Jean-Philippe, Sallagoity, Pascal, Pizzuto, Olivier, Maury, Delphine, Mirabel, Jean-Michel
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)
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Conference Proceeding
Moisture Influence on Reliability and Electrical Characteristics of SiOC:H Low-k Dielectric Material
Vidal-Dho, Matthias, Hubert, Quentin, Gonon, Patrice, Pelissier, Bernard, Fornara, Pascal, Escales, Jean-Philippe, Potard, Pascale, Moragues, Jean-Michel, Ogier, Jean-Luc
Published in 2019 IEEE International Integrated Reliability Workshop (IIRW) (01.10.2019)
Published in 2019 IEEE International Integrated Reliability Workshop (IIRW) (01.10.2019)
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Conference Proceeding