Resonant frequency analysis for spring-mass structure in high-g MEMS accelerometer
Zhenya Geng, Vi Shen, Miao Zhang, Muhua Li, Jing Jin
Published in 2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) (01.05.2013)
Published in 2013 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) (01.05.2013)
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