3D Pattern Effects in RTA Radiative vs Conductive Heating
Granneman, Ernst H., Terhorst, Herbert, Falepin, Annelies, Rosseel, Erik, Verheyden, Kurt, Vanormelingen, Koen, Bourdon, Helene, Halimaoui, Aomar, Funk, Klaus
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
Optimization of annealing for ClusterBoron® and ClusterCarbon PMOS SDE
Karuppanan Sekar, Krull, W., Verheyden, K., Funk, K.
Published in 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.10.2006)
Published in 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors (01.10.2006)
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Conference Proceeding
3D Pattern Effects in RTA Radiative vs Conductive Heating
Granneman, Ernst H., Terhorst, Herbert, Falepin, Annelies, Rosseel, Erik, Verheyden, Kurt, Vanormelingen, Koen, Bourdon, Helene, Halimaoui, Aomar
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
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Journal Article