Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system
Vergöhl, Michael, Rademacher, Daniel, Pflug, Andreas
Published in Surface & coatings technology (25.02.2014)
Published in Surface & coatings technology (25.02.2014)
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Journal Article
Conference Proceeding
Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects
Henkel, Bodo, Neubert, Thomas, Zabel, Sebastian, Lamprecht, Constanze, Selhuber-Unkel, Christine, Rätzke, Klaus, Strunskus, Thomas, Vergöhl, Michael, Faupel, Franz
Published in Applied catalysis. B, Environmental (01.01.2016)
Published in Applied catalysis. B, Environmental (01.01.2016)
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Journal Article
Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system
Vergöhl, Michael, Bruns, Stefan, Rademacher, Daniel, Bräuer, Günter
Published in Surface & coatings technology (15.04.2015)
Published in Surface & coatings technology (15.04.2015)
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Journal Article
Numerical optimization of baffles for sputtering optical precision filters
Pflug, Andreas, Siemers, Michael, Melzig, Thomas, Rademacher, Daniel, Zickenrott, Tobias, Vergöhl, Michael
Published in Surface & coatings technology (25.02.2014)
Published in Surface & coatings technology (25.02.2014)
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Journal Article
Conference Proceeding
Comparison of abrasive tests for transparent optical coatings
Bruns, Stefan, Montzka, Sebastian, Reimann, Wilfried, Vergöhl, Michael
Published in Thin solid films (01.04.2013)
Published in Thin solid films (01.04.2013)
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Journal Article
Conference Proceeding
Properties of reactive sputtered alumina-silica mixtures
Bruns, Stefan, Rademacher, Daniel, Vergöhl, Michael, Weiss, Peter
Published in Applied optics. Optical technology and biomedical optics (01.02.2014)
Published in Applied optics. Optical technology and biomedical optics (01.02.2014)
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Journal Article
Haftfeste Direktmetallisierung von Kunststoffen durch Beschichtung mit Ionen
Bandorf, Ralf, Waschke, Stefan, Vergöhl, Michael, Grundmeier, Guido, Bräuer, Günter
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.08.2015)
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.08.2015)
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Journal Article
A-Si/SiO 2 nanolaminates for tuning the complex refractive index and band gap in optical interference coatings
Kreuzer, Karl, Henning, Philipp, Vergöhl, Michael, Bruns, Stefan, Melzig, Thomas, Patzig, Christian, Feder, René
Published in Applied optics. Optical technology and biomedical optics (20.02.2024)
Published in Applied optics. Optical technology and biomedical optics (20.02.2024)
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Journal Article
Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations
Bruns, Stefan, Henning, Philipp, Melzig, Thomas, Terhürne, Jörg, Vergöhl, Michael
Published in Applied optics. Optical technology and biomedical optics (01.03.2023)
Published in Applied optics. Optical technology and biomedical optics (01.03.2023)
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Journal Article
Influence of fitting algorithms on thickness determination during monitoring of optical coatings
Melzig, Thomas, Amochkina, Tatiana, Bruns, Stefan, Farr, Philipp, Terhürne, Jörg, Trubetskov, Michael, Vergöhl, Michael
Published in Surface & coatings technology (30.01.2024)
Published in Surface & coatings technology (30.01.2024)
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Journal Article
Precise control and adjustment of uniformity for optical coatings on 2D and 3D components
Britze, Chris, Farr, Philipp, Vergöhl, Michael, Pflug, Andreas, Melzig, Thomas, Bruns, Stefan, Schäfer, Bernd, Mann, Klaus, Terhürne, Jörg
Published in Surface & coatings technology (30.03.2024)
Published in Surface & coatings technology (30.03.2024)
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Journal Article
High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, Stefan, Vergöhl, Michael, Werner, Oliver, Wallendorf, Till
Published in Thin solid films (02.04.2012)
Published in Thin solid films (02.04.2012)
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Journal Article
Conference Proceeding
Herstellung von Polymer‐ und Polymer‐Metalloxid‐Kompositschichten: Beschichtungstechniken für optische Interferenzschichtsysteme
Neubert, Thomas, Vergöhl, Michael
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.02.2013)
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.02.2013)
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Journal Article
Optische Interferenzfilter auf Polymerfolien: Spektrale Kanaltrennung in der 3D‐Projektion nach dem Wellenlängenmultiplex‐Verfahren
Rohwer, Klaus, Jorke, Helmut, Neubert, Thomas, Vergöhl, Michael
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.02.2018)
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.02.2018)
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Journal Article
Für den weitesten Weg: Schichten im All
Bräuer, Günter, Brand, Jochen, Britze, Chris, Dietz, Andreas, Kondruweit, Simone, Thomas, Michael, Vergöhl, Michael
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.12.2019)
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.12.2019)
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Journal Article