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Published in Materials Science & Engineering C (01.02.2016)
Published in Materials Science & Engineering C (01.02.2016)
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Tselev, A.E., Polushkin, N.I., Verevkin, Y.K., Gorbunov, A.A., Petryakov, V.N., Pompe, W.
Published in Applied physics. A, Materials science & processing (01.12.1999)
Published in Applied physics. A, Materials science & processing (01.12.1999)
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High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
Ellman, M., Rodríguez, A., Pérez, N., Echeverria, M., Verevkin, Y.K., Peng, C.S., Berthou, T., Wang, Z., Olaizola, S.M., Ayerdi, I.
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Published in Applied surface science (01.03.2009)
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System Requirement Analysis of Laser Interference Nanolithography
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Published in 2007 International Conference on Mechatronics and Automation (01.08.2007)
Published in 2007 International Conference on Mechatronics and Automation (01.08.2007)
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